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- W2080756410 abstract "The effect of post deposition annealing and Al2O3 interlayer introduced between the film and substrate on the nitrogen content in TiN films in TiN/SiO2/Si structures were studied using near-edge X-ray absorption fine structure (NEXAFS) spectroscopy. It was established that: (i) the structure of the studied films corresponds to TiN1−xOx; (ii) annealing the system insignificantly decreases the concentration of the oxygen in the film; (iii) an Al2O3 interlayer prevents diffusion of oxygen from SiO2 and supports high nitrogen content in the TiN-film." @default.
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- W2080756410 date "2014-10-01" @default.
- W2080756410 modified "2023-09-23" @default.
- W2080756410 title "Effect of thermal annealing and Al2O3-interlayer on intermixing in the TiN/SiO2/Si structure" @default.
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- W2080756410 doi "https://doi.org/10.1016/j.elspec.2013.12.001" @default.
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