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• W2080769107 startingPage "095504" @default.
• W2080769107 abstract "Structural analysis by the measurement of carbon K-edge near-edge X-ray absorption fine structure (NEXAFS) using synchrotron radiation was performed on 23 types of silicon-containing diamond-like carbon (Si-DLC) film fabricated by various synthesis methods. In addition, elementary composition in the Si-DLC films was determined by the combination of Rutherford backscattering spectrometry (RBS) and elastic recoil detection analysis (ERDA) using an electrostatic accelerator. In the C K-edge NEXAFS spectra of Si-DLC films, the σ * band shrunk and shifted to the lower-energy side, and the π * peak broadened with increasing silicon content in the Si-DLC film. The observed NEXAFS spectra of Si-DLC films were classified into four types." @default.
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• W2080769107 date "2013-08-28" @default.
• W2080769107 modified "2023-09-26" @default.
• W2080769107 title "Comprehensive Classification of Near-Edge X-ray Absorption Fine Structure Spectra of Si-Containing Diamond-Like Carbon Thin Films" @default.
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• W2080769107 doi "https://doi.org/10.7567/jjap.52.095504" @default.
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