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- W2080883612 abstract "Abstract Highly conductive biaxially textured (both normal to and in the film plane) RuO2 and La0.5Sr0.5CoO3 thin films have been deposited on SiO2/Si substrates for the first time. Yttria-stabilized zirconia (YSZ) produced by ion-beamassisted-deposition (IBAD) is used as a seed layer to induce the biaxial texture of RuO2 and/or La0.5Sr0.5CoO3 on amorphous SiO2/Si. The degree of in-plane texture of the conductive oxide films is directly related to the texture of IBADYSZ. The biaxially oriented RuO2 and L0.5Sr0.5CoO3 films have a metallic resistivity vs temperature characteristic and a room-temperature resistivity of 37 μΩ-cm and 110 μΩ-cm, respectively. Ba0.5Sr0.5TiO3 thin films deposited on SiO2/Si using biaxially oriented RuO2 and La0.5Sr0.5CoO3 as bottom electrodes are (111) and (110) oriented, respectively." @default.
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- W2080883612 date "1998-09-01" @default.
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- W2080883612 title "Oriented conductive oxide electrodes on SiO2/Si" @default.
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- W2080883612 doi "https://doi.org/10.1080/10584589808202080" @default.
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