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- W2080945315 abstract "Study of soft x-ray (0.8 - 10 keV) output from the SPX II, a spherical pinched plasma radiation source, is presented. The soft x-ray output increases with the discharge voltage. The output is also a function of the gases used and pressures. A simple analytic model was developed which can scale the imploding wave velocity with respect to the discharge voltage and the gas density. Experiments to measure the imploding wavefronts were carried out. The predictions of the model agree well with the measured results in a wide range of the parameter space." @default.
- W2080945315 created "2016-06-24" @default.
- W2080945315 creator A5030441807 @default.
- W2080945315 creator A5054735753 @default.
- W2080945315 creator A5055261896 @default.
- W2080945315 creator A5029389156 @default.
- W2080945315 date "1994-05-13" @default.
- W2080945315 modified "2023-09-23" @default.
- W2080945315 title "Soft x-ray output from the spherical pinch plasma radiation source (SPX II) for microlithography applications" @default.
- W2080945315 doi "https://doi.org/10.1117/12.175809" @default.
- W2080945315 hasPublicationYear "1994" @default.
- W2080945315 type Work @default.
- W2080945315 sameAs 2080945315 @default.
- W2080945315 citedByCount "0" @default.
- W2080945315 crossrefType "proceedings-article" @default.
- W2080945315 hasAuthorship W2080945315A5029389156 @default.
- W2080945315 hasAuthorship W2080945315A5030441807 @default.
- W2080945315 hasAuthorship W2080945315A5054735753 @default.
- W2080945315 hasAuthorship W2080945315A5055261896 @default.
- W2080945315 hasConcept C120665830 @default.
- W2080945315 hasConcept C121332964 @default.
- W2080945315 hasConcept C14480152 @default.
- W2080945315 hasConcept C153385146 @default.
- W2080945315 hasConcept C159985019 @default.
- W2080945315 hasConcept C165699331 @default.
- W2080945315 hasConcept C165801399 @default.
- W2080945315 hasConcept C184779094 @default.
- W2080945315 hasConcept C185544564 @default.
- W2080945315 hasConcept C192562407 @default.
- W2080945315 hasConcept C204323151 @default.
- W2080945315 hasConcept C2779328170 @default.
- W2080945315 hasConcept C2780884700 @default.
- W2080945315 hasConcept C30475298 @default.
- W2080945315 hasConcept C43503373 @default.
- W2080945315 hasConcept C62520636 @default.
- W2080945315 hasConcept C82706917 @default.
- W2080945315 hasConceptScore W2080945315C120665830 @default.
- W2080945315 hasConceptScore W2080945315C121332964 @default.
- W2080945315 hasConceptScore W2080945315C14480152 @default.
- W2080945315 hasConceptScore W2080945315C153385146 @default.
- W2080945315 hasConceptScore W2080945315C159985019 @default.
- W2080945315 hasConceptScore W2080945315C165699331 @default.
- W2080945315 hasConceptScore W2080945315C165801399 @default.
- W2080945315 hasConceptScore W2080945315C184779094 @default.
- W2080945315 hasConceptScore W2080945315C185544564 @default.
- W2080945315 hasConceptScore W2080945315C192562407 @default.
- W2080945315 hasConceptScore W2080945315C204323151 @default.
- W2080945315 hasConceptScore W2080945315C2779328170 @default.
- W2080945315 hasConceptScore W2080945315C2780884700 @default.
- W2080945315 hasConceptScore W2080945315C30475298 @default.
- W2080945315 hasConceptScore W2080945315C43503373 @default.
- W2080945315 hasConceptScore W2080945315C62520636 @default.
- W2080945315 hasConceptScore W2080945315C82706917 @default.
- W2080945315 hasLocation W20809453151 @default.
- W2080945315 hasOpenAccess W2080945315 @default.
- W2080945315 hasPrimaryLocation W20809453151 @default.
- W2080945315 hasRelatedWork W1600860510 @default.
- W2080945315 hasRelatedWork W1891853044 @default.
- W2080945315 hasRelatedWork W1964271117 @default.
- W2080945315 hasRelatedWork W1991901791 @default.
- W2080945315 hasRelatedWork W1993780342 @default.
- W2080945315 hasRelatedWork W1995489978 @default.
- W2080945315 hasRelatedWork W2027628678 @default.
- W2080945315 hasRelatedWork W2039564917 @default.
- W2080945315 hasRelatedWork W2056141612 @default.
- W2080945315 hasRelatedWork W2080945315 @default.
- W2080945315 isParatext "false" @default.
- W2080945315 isRetracted "false" @default.
- W2080945315 magId "2080945315" @default.
- W2080945315 workType "article" @default.