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- W2080951929 abstract "This work reports the methodology of aluminum nitride (AIN/Mo) and Molybdenum (Mo) etching specifically m microelectromechamcal systems (MEMS) fabrication. AIN/Mo etching is investigated in electron cyclotron resonance (ECR) reactive ion etching. It is found that the amsotropy of wet etching of AIN/Mo is notably affected by the crystal orientation (002) of the material. AIN/Mo etching is a critical step in AIN/Mo platform and essential to applications such as radio frequency (RF) MEMS and mertial MEMS." @default.
- W2080951929 created "2016-06-24" @default.
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- W2080951929 date "2012-12-01" @default.
- W2080951929 modified "2023-09-26" @default.
- W2080951929 title "Plasma etching process of AIN/Mo and Moly for CMOS compatible MEMS devices" @default.
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- W2080951929 doi "https://doi.org/10.1109/eptc.2012.6507182" @default.
- W2080951929 hasPublicationYear "2012" @default.
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