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- W2080988839 endingPage "2175" @default.
- W2080988839 startingPage "2171" @default.
- W2080988839 abstract "Electronic structures and etching processes of chlorinated Si(111) surfaces are investigated using the first-principles calculation. It is shown that the monochloride on the surface easily produces a dichloride by colliding with Cl and evaporating as a SiCl2 unit, while the trichloride evaporates from the surface as a SiCl2 unit leaving one Cl atom as a monochloride. The activation energies of these processes are less than 3.6 and 1.5 eV, respectively, which values are smaller than those of the simple desorption of SiCl and SiCl3. These results indicate that although the chlorinated Si(111) shows a variety of adsorbed forms such as SiCl, SiCl2, and SiCl3, the desorption unit is always SiCl2, which well explains the observations." @default.
- W2080988839 created "2016-06-24" @default.
- W2080988839 creator A5064028003 @default.
- W2080988839 creator A5079331003 @default.
- W2080988839 date "2002-04-15" @default.
- W2080988839 modified "2023-09-26" @default.
- W2080988839 title "Electronic Structures and Etching Processes of Chlorinated Si(111) Surfaces" @default.
- W2080988839 cites W2019359936 @default.
- W2080988839 cites W2021458574 @default.
- W2080988839 doi "https://doi.org/10.1143/jjap.41.2171" @default.
- W2080988839 hasPublicationYear "2002" @default.
- W2080988839 type Work @default.
- W2080988839 sameAs 2080988839 @default.
- W2080988839 citedByCount "20" @default.
- W2080988839 countsByYear W20809888392012 @default.
- W2080988839 countsByYear W20809888392013 @default.
- W2080988839 countsByYear W20809888392014 @default.
- W2080988839 countsByYear W20809888392018 @default.
- W2080988839 countsByYear W20809888392021 @default.
- W2080988839 countsByYear W20809888392023 @default.
- W2080988839 crossrefType "journal-article" @default.
- W2080988839 hasAuthorship W2080988839A5064028003 @default.
- W2080988839 hasAuthorship W2080988839A5079331003 @default.
- W2080988839 hasConcept C100460472 @default.
- W2080988839 hasConcept C171250308 @default.
- W2080988839 hasConcept C185592680 @default.
- W2080988839 hasConcept C192562407 @default.
- W2080988839 hasConcept C2779227376 @default.
- W2080988839 hasConceptScore W2080988839C100460472 @default.
- W2080988839 hasConceptScore W2080988839C171250308 @default.
- W2080988839 hasConceptScore W2080988839C185592680 @default.
- W2080988839 hasConceptScore W2080988839C192562407 @default.
- W2080988839 hasConceptScore W2080988839C2779227376 @default.
- W2080988839 hasIssue "Part 1, No. 4A" @default.
- W2080988839 hasLocation W20809888391 @default.
- W2080988839 hasOpenAccess W2080988839 @default.
- W2080988839 hasPrimaryLocation W20809888391 @default.
- W2080988839 hasRelatedWork W2322197603 @default.
- W2080988839 hasRelatedWork W2400644286 @default.
- W2080988839 hasRelatedWork W2462115696 @default.
- W2080988839 hasRelatedWork W2515483758 @default.
- W2080988839 hasRelatedWork W2899084033 @default.
- W2080988839 hasRelatedWork W2923172560 @default.
- W2080988839 hasRelatedWork W2951776294 @default.
- W2080988839 hasRelatedWork W3000789669 @default.
- W2080988839 hasRelatedWork W4284891372 @default.
- W2080988839 hasRelatedWork W4285022007 @default.
- W2080988839 hasVolume "41" @default.
- W2080988839 isParatext "false" @default.
- W2080988839 isRetracted "false" @default.
- W2080988839 magId "2080988839" @default.
- W2080988839 workType "article" @default.