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- W2081023930 abstract "Results of the low-temperature precipitation of interstitial Fe (ensuremath{approxeq}250 ifmmode^circelsetextdegreefi{}C) in Czochralski-grown Si after different annealing treatments for the precipitation of oxygen are presented. It is concluded that the Fe solubility is not affected by the oxygen-precipitation process. The Fe-precipitation kinetics are found to be strongly accelerated by oxygen-precipitation--induced defects. Based on the results the mechanism of internal gettering is derived. For the first time the contribution of oxygen precipitates and dislocations to the internal-gettering process have been determined quantitatively." @default.
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- W2081023930 date "1990-01-08" @default.
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- W2081023930 title "Mechanism of internal gettering of interstitial impurities in Czochralski-grown silicon" @default.
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- W2081023930 doi "https://doi.org/10.1103/physrevlett.64.196" @default.
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