Matches in SemOpenAlex for { <https://semopenalex.org/work/W2081036997> ?p ?o ?g. }
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91
with 100 items per page.
- W2081036997 endingPage "6057" @default.
- W2081036997 startingPage "6055" @default.
- W2081036997 abstract "Study of the growth of ultrathin (≤100 Å) silicon dioxide (SiO2) films by thermal pyrolysis of tetraethoxysilane (TEOS) has been conducted. The oxide growth follows a first-order or near first-order relationship with respect to partial pressure of TEOS. The reaction appears to proceed via heterogeneous decomposition with byproduct inhibition with no incubation period. An extremely slow growth process has been investigated for depositing the SiO2 film with monolayer thickness control, which is considered to be a critical requirement for forming ultra-large-scale integrated devices." @default.
- W2081036997 created "2016-06-24" @default.
- W2081036997 creator A5065588818 @default.
- W2081036997 creator A5087642755 @default.
- W2081036997 creator A5089377081 @default.
- W2081036997 date "1995-06-01" @default.
- W2081036997 modified "2023-09-26" @default.
- W2081036997 title "Deposition of ultrathin silicon dioxide film from pyrolysis of tetraethoxysilane" @default.
- W2081036997 cites W1986945583 @default.
- W2081036997 cites W1988275970 @default.
- W2081036997 cites W1989188301 @default.
- W2081036997 cites W2050162673 @default.
- W2081036997 cites W2061782859 @default.
- W2081036997 cites W2062282255 @default.
- W2081036997 cites W2127315011 @default.
- W2081036997 doi "https://doi.org/10.1063/1.359589" @default.
- W2081036997 hasPublicationYear "1995" @default.
- W2081036997 type Work @default.
- W2081036997 sameAs 2081036997 @default.
- W2081036997 citedByCount "3" @default.
- W2081036997 crossrefType "journal-article" @default.
- W2081036997 hasAuthorship W2081036997A5065588818 @default.
- W2081036997 hasAuthorship W2081036997A5087642755 @default.
- W2081036997 hasAuthorship W2081036997A5089377081 @default.
- W2081036997 hasConcept C124681953 @default.
- W2081036997 hasConcept C127413603 @default.
- W2081036997 hasConcept C151730666 @default.
- W2081036997 hasConcept C159985019 @default.
- W2081036997 hasConcept C160434732 @default.
- W2081036997 hasConcept C171250308 @default.
- W2081036997 hasConcept C178790620 @default.
- W2081036997 hasConcept C179104552 @default.
- W2081036997 hasConcept C185592680 @default.
- W2081036997 hasConcept C19067145 @default.
- W2081036997 hasConcept C191897082 @default.
- W2081036997 hasConcept C192562407 @default.
- W2081036997 hasConcept C2779089622 @default.
- W2081036997 hasConcept C2779851234 @default.
- W2081036997 hasConcept C2816523 @default.
- W2081036997 hasConcept C36759035 @default.
- W2081036997 hasConcept C42360764 @default.
- W2081036997 hasConcept C540031477 @default.
- W2081036997 hasConcept C544956773 @default.
- W2081036997 hasConcept C64297162 @default.
- W2081036997 hasConcept C68463220 @default.
- W2081036997 hasConcept C7070889 @default.
- W2081036997 hasConcept C86803240 @default.
- W2081036997 hasConceptScore W2081036997C124681953 @default.
- W2081036997 hasConceptScore W2081036997C127413603 @default.
- W2081036997 hasConceptScore W2081036997C151730666 @default.
- W2081036997 hasConceptScore W2081036997C159985019 @default.
- W2081036997 hasConceptScore W2081036997C160434732 @default.
- W2081036997 hasConceptScore W2081036997C171250308 @default.
- W2081036997 hasConceptScore W2081036997C178790620 @default.
- W2081036997 hasConceptScore W2081036997C179104552 @default.
- W2081036997 hasConceptScore W2081036997C185592680 @default.
- W2081036997 hasConceptScore W2081036997C19067145 @default.
- W2081036997 hasConceptScore W2081036997C191897082 @default.
- W2081036997 hasConceptScore W2081036997C192562407 @default.
- W2081036997 hasConceptScore W2081036997C2779089622 @default.
- W2081036997 hasConceptScore W2081036997C2779851234 @default.
- W2081036997 hasConceptScore W2081036997C2816523 @default.
- W2081036997 hasConceptScore W2081036997C36759035 @default.
- W2081036997 hasConceptScore W2081036997C42360764 @default.
- W2081036997 hasConceptScore W2081036997C540031477 @default.
- W2081036997 hasConceptScore W2081036997C544956773 @default.
- W2081036997 hasConceptScore W2081036997C64297162 @default.
- W2081036997 hasConceptScore W2081036997C68463220 @default.
- W2081036997 hasConceptScore W2081036997C7070889 @default.
- W2081036997 hasConceptScore W2081036997C86803240 @default.
- W2081036997 hasIssue "11" @default.
- W2081036997 hasLocation W20810369971 @default.
- W2081036997 hasOpenAccess W2081036997 @default.
- W2081036997 hasPrimaryLocation W20810369971 @default.
- W2081036997 hasRelatedWork W1974176297 @default.
- W2081036997 hasRelatedWork W1986421699 @default.
- W2081036997 hasRelatedWork W1996264357 @default.
- W2081036997 hasRelatedWork W2041450217 @default.
- W2081036997 hasRelatedWork W2079874170 @default.
- W2081036997 hasRelatedWork W2085983576 @default.
- W2081036997 hasRelatedWork W2130483786 @default.
- W2081036997 hasRelatedWork W2605803311 @default.
- W2081036997 hasRelatedWork W2782070640 @default.
- W2081036997 hasRelatedWork W3127889893 @default.
- W2081036997 hasVolume "77" @default.
- W2081036997 isParatext "false" @default.
- W2081036997 isRetracted "false" @default.
- W2081036997 magId "2081036997" @default.
- W2081036997 workType "article" @default.