Matches in SemOpenAlex for { <https://semopenalex.org/work/W2081161512> ?p ?o ?g. }
Showing items 1 to 83 of
83
with 100 items per page.
- W2081161512 endingPage "327" @default.
- W2081161512 startingPage "319" @default.
- W2081161512 abstract "This paper proposes a generic methodology for building a multiparametric virtual metrology (VM) model that predicts the chemical-mechanical polishing (CMP) rate in the mass production of many different products in small quantities using multiple tools in a job shop. The VM model must handle inter-individual differences in both products and tools, with multiple parameters. To identify the multiparametric VM model from datasets of small samples collected from the tools in the early stages of mass production, all the datasets are fused together using a Markov chain Monte Carlo method for a hierarchical Bayesian model. The proposed method is validated by simulation experiments using real manufacturing data collected from six tools for seven mixed products. In particular, the 18 parameters of the VM model are identifiable even from a fusion of the datasets with just 10 samples from each of the tools. The root mean square of errors (RMSE) of the variation in the polished amount decreases to 41% when using the APC with the VM model." @default.
- W2081161512 created "2016-06-24" @default.
- W2081161512 creator A5071431232 @default.
- W2081161512 creator A5081415919 @default.
- W2081161512 date "2013-08-01" @default.
- W2081161512 modified "2023-10-16" @default.
- W2081161512 title "Multiparametric Virtual Metrology Model Building by Job-Shop Data Fusion Using a Markov Chain Monte Carlo Method" @default.
- W2081161512 cites W1960881728 @default.
- W2081161512 cites W2075852334 @default.
- W2081161512 cites W2104018023 @default.
- W2081161512 cites W2115571336 @default.
- W2081161512 cites W2129431599 @default.
- W2081161512 cites W2139430280 @default.
- W2081161512 cites W2147973445 @default.
- W2081161512 cites W2154829656 @default.
- W2081161512 cites W2162251039 @default.
- W2081161512 cites W2543065707 @default.
- W2081161512 cites W609155125 @default.
- W2081161512 doi "https://doi.org/10.1109/tsm.2013.2257897" @default.
- W2081161512 hasPublicationYear "2013" @default.
- W2081161512 type Work @default.
- W2081161512 sameAs 2081161512 @default.
- W2081161512 citedByCount "7" @default.
- W2081161512 countsByYear W20811615122014 @default.
- W2081161512 countsByYear W20811615122015 @default.
- W2081161512 countsByYear W20811615122018 @default.
- W2081161512 countsByYear W20811615122019 @default.
- W2081161512 countsByYear W20811615122020 @default.
- W2081161512 countsByYear W20811615122021 @default.
- W2081161512 crossrefType "journal-article" @default.
- W2081161512 hasAuthorship W2081161512A5071431232 @default.
- W2081161512 hasAuthorship W2081161512A5081415919 @default.
- W2081161512 hasConcept C105795698 @default.
- W2081161512 hasConcept C107673813 @default.
- W2081161512 hasConcept C111350023 @default.
- W2081161512 hasConcept C119857082 @default.
- W2081161512 hasConcept C124101348 @default.
- W2081161512 hasConcept C127413603 @default.
- W2081161512 hasConcept C138113353 @default.
- W2081161512 hasConcept C139945424 @default.
- W2081161512 hasConcept C154945302 @default.
- W2081161512 hasConcept C19499675 @default.
- W2081161512 hasConcept C195766429 @default.
- W2081161512 hasConcept C33923547 @default.
- W2081161512 hasConcept C41008148 @default.
- W2081161512 hasConcept C78519656 @default.
- W2081161512 hasConcept C98763669 @default.
- W2081161512 hasConceptScore W2081161512C105795698 @default.
- W2081161512 hasConceptScore W2081161512C107673813 @default.
- W2081161512 hasConceptScore W2081161512C111350023 @default.
- W2081161512 hasConceptScore W2081161512C119857082 @default.
- W2081161512 hasConceptScore W2081161512C124101348 @default.
- W2081161512 hasConceptScore W2081161512C127413603 @default.
- W2081161512 hasConceptScore W2081161512C138113353 @default.
- W2081161512 hasConceptScore W2081161512C139945424 @default.
- W2081161512 hasConceptScore W2081161512C154945302 @default.
- W2081161512 hasConceptScore W2081161512C19499675 @default.
- W2081161512 hasConceptScore W2081161512C195766429 @default.
- W2081161512 hasConceptScore W2081161512C33923547 @default.
- W2081161512 hasConceptScore W2081161512C41008148 @default.
- W2081161512 hasConceptScore W2081161512C78519656 @default.
- W2081161512 hasConceptScore W2081161512C98763669 @default.
- W2081161512 hasIssue "3" @default.
- W2081161512 hasLocation W20811615121 @default.
- W2081161512 hasOpenAccess W2081161512 @default.
- W2081161512 hasPrimaryLocation W20811615121 @default.
- W2081161512 hasRelatedWork W2015347953 @default.
- W2081161512 hasRelatedWork W2059138467 @default.
- W2081161512 hasRelatedWork W2139496888 @default.
- W2081161512 hasRelatedWork W2196588953 @default.
- W2081161512 hasRelatedWork W2334607362 @default.
- W2081161512 hasRelatedWork W311059858 @default.
- W2081161512 hasRelatedWork W3199945127 @default.
- W2081161512 hasRelatedWork W606102545 @default.
- W2081161512 hasRelatedWork W646908809 @default.
- W2081161512 hasRelatedWork W1970659328 @default.
- W2081161512 hasVolume "26" @default.
- W2081161512 isParatext "false" @default.
- W2081161512 isRetracted "false" @default.
- W2081161512 magId "2081161512" @default.
- W2081161512 workType "article" @default.