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• W2081479765 abstract "The substantial expansion of the temperature range for atomic layer epitaxy (ALE) was reported using triethyl-gallium by K. Fujii, I. Suemune, T. Koui, and M. Yamanishi [Appl. Phys. Lett. 60, 1498 (1992)]. This was observed by replacing arsine with an amino-As, tris-dimethylamino-arsenic {As[N(CH3)2]3}. The self-limiting mechanism was attributed to the adsorption of amine species on the Ga as well as As surfaces. The time constants and the activation energies for the desorption of the amine species were measured using transient quadrupole mass spectrometry. It is shown that the adsorption properties of the amine species on the Ga surfaces are intermediate between those of methyl and ethyl species." @default.
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• W2081479765 date "1992-11-23" @default.
• W2081479765 modified "2023-09-27" @default.
• W2081479765 title "Desorption properties of amine species during atomic layer epitaxy of GaAs using amino‐As" @default.
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• W2081479765 doi "https://doi.org/10.1063/1.108132" @default.
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