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- W2081587668 abstract "A low-temperature method of fabricating low-resistivity CoSi2/p+ and CoSi2/n+ contacts is described. Single-crystal Si〈100〉 was implanted with group III or V ions through a 28.4 nm thick evaporated Co film for ion beam mixing and junction doping. Appropriate implantation parameters were chosen which caused a maximum of ion-induced damage at the Co/Si interface and a dopant maximum within the silicide formed later on. By subsequent rapid thermal annealing (RTA), a shallow junction and a 100 nm thick CoSi2 layer with a resistivity of 17 μΩ cm were formed simultaneously. The CoSi2 films were characterized by TEM, XRD and sheet resistance measurements. SIMS and carrier concentration measurements were used to determine dopant distribution and junction depth. Specific contact resistances of CoSi2/n+ and CoSi2/p+ junctions are presented." @default.
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- W2081587668 date "1991-07-01" @default.
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- W2081587668 title "Formation of CoSi2 by ion beam mixing and rapid thermal annealing" @default.
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- W2081587668 doi "https://doi.org/10.1016/0168-583x(91)95271-e" @default.
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