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- W2081674934 abstract "The application of chemically amplified resist is known to cause a problem in the accurate measurement of the concentration of basic gas species ( NH 3 , N-methylpyrrolidone (NMP)) in a clean room environment because it is sensitive to its environment. Among various methods of measurement, diffusion scrubber sampling method was selected and tested. The environmental sensitivity of a commercial chemically amplified resist, APEX-E, was also tested. For the concentration measurement, the method proved to be suitable for automation and good for measuring NH 3 concentration as low as the sub ppb level (limit of detection ∼0.08 ppb). Some measurement results concerning various aspects of application are presented. Test results of the environmental stability of chemically amplified resists showed that NH 3 concentration should be controlled to at least under 7.5 ppb for maintaining the process stability." @default.
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- W2081674934 date "1995-12-01" @default.
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- W2081674934 title "Real Time Monitoring of NH<sub>3</sub> Concentration Using Diffusion Scrubber Sampling Technique and Result of Application to the Processing of Chemically Amplified Resists" @default.
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- W2081674934 doi "https://doi.org/10.1143/jjap.34.6770" @default.
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