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- W2081683277 abstract "In this paper, we present experimental measurements of the strain energy release rate for stiction-failed polysilicon microcantilevers using a newly developed single cantilever beam peel test. Our experiments show that dry-contacting microcantilevers adhere exclusively as tip-stuck, arc-shaped stiction failures, while adhesion under wet conditions generate exclusively s-shaped stiction failures. Microcantilevers were peeled from the substrate under displacement control using a piezoelectric actuator attached to one end of an array of microcantilever beams. The crack length was monitored using interferometric imaging, and related to the applied displacement using established equations from linear elastic fracture mechanics. The pull-off forces associated with arc-shaped stiction failures were an average value of 89.7 nN, for 1000 mum long beams, and an average value of 123 nN for 1500 mum long beams. Adhesion energies for s-shaped failures were measured as 13.7 mJ/m <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> for IPA released beams and 15.4 mJ/m <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> for deionized water released beams. These values are in good agreement with previous measurements. The proposed experimental method enables application of a simple fracture mechanics model using a standard specimen geometry. These experiments, using both wet and dry adhesion failure conditions, show that the quality of the adhesive failure depends upon the magnitude of the forces pulling the microcantilever into contact with the underlying substrate" @default.
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- W2081683277 date "2007-02-01" @default.
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- W2081683277 title "Experimental Measurements of the Strain Energy Release Rate for Stiction-Failed Microcantilevers Using a Single-Cantilever Beam Peel Test" @default.
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- W2081683277 doi "https://doi.org/10.1109/jmems.2006.883570" @default.
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