FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2081844289> ?p ?o ?g. }

• W2081844289 endingPage "20371" @default.
• W2081844289 startingPage "20360" @default.
• W2081844289 abstract "The study develops an integrated humidity microsensor fabricated using the commercial 0.18 μm complementary metal oxide semiconductor (CMOS) process. The integrated humidity sensor consists of a humidity sensor and a ring oscillator circuit on-a-chip. The humidity sensor is composed of a sensitive film and branch interdigitated electrodes. The sensitive film is zinc oxide prepared by sol-gel method. After completion of the CMOS process, the sensor requires a post-process to remove the sacrificial oxide layer and to coat the zinc oxide film on the interdigitated electrodes. The capacitance of the sensor changes when the sensitive film adsorbs water vapor. The circuit is used to convert the capacitance of the humidity sensor into the oscillation frequency output. Experimental results show that the output frequency of the sensor changes from 84.3 to 73.4 MHz at 30 °C as the humidity increases 40 to 90%RH." @default.
• W2081844289 created "2016-06-24" @default.
• W2081844289 creator A5005155364 @default.
• W2081844289 creator A5031981185 @default.
• W2081844289 creator A5052420595 @default.
• W2081844289 date "2014-10-28" @default.
• W2081844289 modified "2023-09-29" @default.
• W2081844289 title "Sol-Gel Zinc Oxide Humidity Sensors Integrated with a Ring Oscillator Circuit On-a-Chip" @default.
• W2081844289 cites W1964403576 @default.
• W2081844289 cites W1967654265 @default.
• W2081844289 cites W1967919594 @default.
• W2081844289 cites W1996873585 @default.
• W2081844289 cites W2005360663 @default.
• W2081844289 cites W2025179016 @default.
• W2081844289 cites W2028873622 @default.
• W2081844289 cites W2031739436 @default.
• W2081844289 cites W2089148007 @default.
• W2081844289 cites W2093739262 @default.
• W2081844289 cites W2095334449 @default.
• W2081844289 cites W2106788069 @default.
• W2081844289 cites W2118639624 @default.
• W2081844289 cites W2118751963 @default.
• W2081844289 cites W2137562005 @default.
• W2081844289 cites W2160677031 @default.
• W2081844289 cites W2165091860 @default.
• W2081844289 cites W2166721839 @default.
• W2081844289 cites W4378780126 @default.
• W2081844289 cites W3151880564 @default.
• W2081844289 doi "https://doi.org/10.3390/s141120360" @default.
• W2081844289 hasPubMedCentralId "https://www.ncbi.nlm.nih.gov/pmc/articles/4279487" @default.
• W2081844289 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/25353984" @default.
• W2081844289 hasPublicationYear "2014" @default.
• W2081844289 type Work @default.
• W2081844289 sameAs 2081844289 @default.
• W2081844289 citedByCount "20" @default.
• W2081844289 countsByYear W20818442892016 @default.
• W2081844289 countsByYear W20818442892018 @default.
• W2081844289 countsByYear W20818442892019 @default.
• W2081844289 countsByYear W20818442892020 @default.
• W2081844289 countsByYear W20818442892021 @default.
• W2081844289 countsByYear W20818442892022 @default.
• W2081844289 countsByYear W20818442892023 @default.
• W2081844289 crossrefType "journal-article" @default.
• W2081844289 hasAuthorship W2081844289A5005155364 @default.
• W2081844289 hasAuthorship W2081844289A5031981185 @default.
• W2081844289 hasAuthorship W2081844289A5052420595 @default.
• W2081844289 hasBestOaLocation W20818442891 @default.
• W2081844289 hasConcept C104111718 @default.
• W2081844289 hasConcept C121332964 @default.
• W2081844289 hasConcept C147789679 @default.
• W2081844289 hasConcept C151420433 @default.
• W2081844289 hasConcept C158960510 @default.
• W2081844289 hasConcept C17525397 @default.
• W2081844289 hasConcept C185592680 @default.
• W2081844289 hasConcept C191897082 @default.
• W2081844289 hasConcept C192562407 @default.
• W2081844289 hasConcept C2779851234 @default.
• W2081844289 hasConcept C30066665 @default.
• W2081844289 hasConcept C46362747 @default.
• W2081844289 hasConcept C49040817 @default.
• W2081844289 hasConcept C535196362 @default.
• W2081844289 hasConcept C97355855 @default.
• W2081844289 hasConceptScore W2081844289C104111718 @default.
• W2081844289 hasConceptScore W2081844289C121332964 @default.
• W2081844289 hasConceptScore W2081844289C147789679 @default.
• W2081844289 hasConceptScore W2081844289C151420433 @default.
• W2081844289 hasConceptScore W2081844289C158960510 @default.
• W2081844289 hasConceptScore W2081844289C17525397 @default.
• W2081844289 hasConceptScore W2081844289C185592680 @default.
• W2081844289 hasConceptScore W2081844289C191897082 @default.
• W2081844289 hasConceptScore W2081844289C192562407 @default.
• W2081844289 hasConceptScore W2081844289C2779851234 @default.
• W2081844289 hasConceptScore W2081844289C30066665 @default.
• W2081844289 hasConceptScore W2081844289C46362747 @default.
• W2081844289 hasConceptScore W2081844289C49040817 @default.
• W2081844289 hasConceptScore W2081844289C535196362 @default.
• W2081844289 hasConceptScore W2081844289C97355855 @default.
• W2081844289 hasIssue "11" @default.
• W2081844289 hasLocation W20818442891 @default.
• W2081844289 hasLocation W20818442892 @default.
• W2081844289 hasLocation W20818442893 @default.
• W2081844289 hasLocation W20818442894 @default.
• W2081844289 hasOpenAccess W2081844289 @default.
• W2081844289 hasPrimaryLocation W20818442891 @default.
• W2081844289 hasRelatedWork W1834896238 @default.
• W2081844289 hasRelatedWork W1881575332 @default.
• W2081844289 hasRelatedWork W1966500962 @default.
• W2081844289 hasRelatedWork W2033081078 @default.
• W2081844289 hasRelatedWork W2269145440 @default.
• W2081844289 hasRelatedWork W2355186476 @default.
• W2081844289 hasRelatedWork W2914352877 @default.
• W2081844289 hasRelatedWork W2999404065 @default.
• W2081844289 hasRelatedWork W3172947089 @default.
• W2081844289 hasRelatedWork W2994758163 @default.
• W2081844289 hasVolume "14" @default.
• W2081844289 isParatext "false" @default.
• W2081844289 isRetracted "false" @default.
• W2081844289 magId "2081844289" @default.

• next