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- W2081887986 abstract "The problems associated with photomask production are categorized as follow:© (1976) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only." @default.
- W2081887986 created "2016-06-24" @default.
- W2081887986 creator A5007416858 @default.
- W2081887986 date "1976-09-20" @default.
- W2081887986 modified "2023-09-23" @default.
- W2081887986 title "<title>Photomask quality problems</title>" @default.
- W2081887986 doi "https://doi.org/10.1117/12.954849" @default.
- W2081887986 hasPublicationYear "1976" @default.
- W2081887986 type Work @default.
- W2081887986 sameAs 2081887986 @default.
- W2081887986 citedByCount "0" @default.
- W2081887986 crossrefType "proceedings-article" @default.
- W2081887986 hasAuthorship W2081887986A5007416858 @default.
- W2081887986 hasConcept C111472728 @default.
- W2081887986 hasConcept C138885662 @default.
- W2081887986 hasConcept C14737013 @default.
- W2081887986 hasConcept C178790620 @default.
- W2081887986 hasConcept C185592680 @default.
- W2081887986 hasConcept C2779227376 @default.
- W2081887986 hasConcept C2779530757 @default.
- W2081887986 hasConcept C41008148 @default.
- W2081887986 hasConcept C53524968 @default.
- W2081887986 hasConceptScore W2081887986C111472728 @default.
- W2081887986 hasConceptScore W2081887986C138885662 @default.
- W2081887986 hasConceptScore W2081887986C14737013 @default.
- W2081887986 hasConceptScore W2081887986C178790620 @default.
- W2081887986 hasConceptScore W2081887986C185592680 @default.
- W2081887986 hasConceptScore W2081887986C2779227376 @default.
- W2081887986 hasConceptScore W2081887986C2779530757 @default.
- W2081887986 hasConceptScore W2081887986C41008148 @default.
- W2081887986 hasConceptScore W2081887986C53524968 @default.
- W2081887986 hasLocation W20818879861 @default.
- W2081887986 hasOpenAccess W2081887986 @default.
- W2081887986 hasPrimaryLocation W20818879861 @default.
- W2081887986 hasRelatedWork W1664708007 @default.
- W2081887986 hasRelatedWork W2060503557 @default.
- W2081887986 hasRelatedWork W2080960023 @default.
- W2081887986 hasRelatedWork W2086886478 @default.
- W2081887986 hasRelatedWork W2354748235 @default.
- W2081887986 hasRelatedWork W2558319618 @default.
- W2081887986 hasRelatedWork W2606849949 @default.
- W2081887986 hasRelatedWork W3044870598 @default.
- W2081887986 hasRelatedWork W3126256588 @default.
- W2081887986 hasRelatedWork W3153788678 @default.
- W2081887986 hasRelatedWork W3161567091 @default.
- W2081887986 hasRelatedWork W3163652800 @default.
- W2081887986 hasRelatedWork W3164116369 @default.
- W2081887986 hasRelatedWork W3176863085 @default.
- W2081887986 hasRelatedWork W3184541375 @default.
- W2081887986 hasRelatedWork W2925059878 @default.
- W2081887986 hasRelatedWork W2936758076 @default.
- W2081887986 hasRelatedWork W3116717054 @default.
- W2081887986 isParatext "false" @default.
- W2081887986 isRetracted "false" @default.
- W2081887986 magId "2081887986" @default.
- W2081887986 workType "article" @default.