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- W2081900305 abstract "Copper micro-coil arrays have been designed and realized by electroplating for the actuation of arrays of optical matrix micro-switches. The good operation of the micro-switches needs large force that is well fulfilled by the electromagnetic actuation of copper micro-coils. The electromagnetic behavior of the actuator has been examined using the simulator FLUX2D<SUP>TM</SUP> and an optimized configuration of ferromagnetic materials was determined. Arrays of micro-coils with high aspect ratio have been achieved with the use of SU8 resin mould. The diameters of micro-coils range from 0.5 millimeters to 4 millimeters with thickness of about 30 micrometers and few tens of turns. Electric measurements have been done in order to characterize the micro-coils." @default.
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- W2081900305 date "2001-11-21" @default.
- W2081900305 modified "2023-10-03" @default.
- W2081900305 title "Copper microcoil arrays for the actuation of optical matrix microswitches" @default.
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- W2081900305 doi "https://doi.org/10.1117/12.448997" @default.
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