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- W2081917674 abstract "An apparatus designed to determine the thickness of films deposited on metal slides is described. It is based on the measurement of the change that takes place in ellipticity of the light reflected after a slide has been coated with the film under investigation. The apparatus is capable of measuring a film thickness within ±0.3A, a sensitivity at least ten times greater than that obtained with the method based on light interference." @default.
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- W2081917674 date "1945-02-01" @default.
- W2081917674 modified "2023-10-10" @default.
- W2081917674 title "The Ellipsometer, an Apparatus to Measure Thicknesses of Thin Surface Films" @default.
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- W2081917674 doi "https://doi.org/10.1063/1.1770315" @default.
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