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• W2081978430 abstract "A numerical model for the MetalOrganic CVD of alumina from aluminium tri‐isopropoxide (ATI), based on an apparent heterogeneous kinetic law was developed using the Computational Fluid Dynamics (CFD) code Fluent. The kinetic parameters were fitted from experimental deposition rates obtained between 360°C and 496°C at a total pressure of 5Torr. Simulated local profiles of alumina deposition rate allowed reproducing the non uniformity of experimental deposition rates due to the dominance of convective gas transport and the depletion of ATI." @default.
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• W2081978430 date "2011-08-31" @default.
• W2081978430 modified "2023-10-16" @default.
• W2081978430 title "Local Kinetic Modeling of Aluminum Oxide Metal‐Organic CVD From Aluminum Tri‐isopropoxide" @default.
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• W2081978430 doi "https://doi.org/10.1002/cvde.201004301" @default.
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