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- W2082078377 endingPage "052001" @default.
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- W2082078377 abstract "An enhanced scheme for a functional bilayered composite material with shape memory effect has been successfully applied on the microscale to fabricate a thermally controlled microactuator. Fabrication of cantilever-type microactuators from melt spun ribbon of TiNiCu shape memory alloy included electro-chemical polishing followed by focused ion beam milling and ion-assisted chemical vapor deposition of Pt elastic layer. The smallest working microactuator had a volume of 0.9 µm3. The structure and thermal stability of the Pt layer have been investigated. The fabricated actuator has been proposed for use as micromechanical nanotweezers for manipulation of submicron- and nano-sized objects. Manipulation of a carbon nanotube bunch has been demonstrated." @default.
- W2082078377 created "2016-06-24" @default.
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- W2082078377 date "2012-04-18" @default.
- W2082078377 modified "2023-09-27" @default.
- W2082078377 title "Submicron-sized actuators based on enhanced shape memory composite material fabricated by FIB-CVD" @default.
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- W2082078377 doi "https://doi.org/10.1088/0964-1726/21/5/052001" @default.
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