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- W2082079660 abstract "The influence of RTA pre-treatments on the morphology of oxygen precipitates in silicon wafers as deduced from haze getter tests was confirmed by FTIR and TEM investigations. Based on the results of the getter tests, the ratio between the density of plate-like and octahedral precipitates was calculated for RTA pre-treated silicon samples." @default.
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- W2082079660 date "2012-07-01" @default.
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- W2082079660 title "Impact of RTA on the Morphology of Oxygen Precipitates and on the Getter Efficiency for Cu and Ni in Si Wafers" @default.
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