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- W2082112896 abstract "An optical heterodyne system for the measurement of profile and roughness has been developed. Several improved techniques are employed. The optical system was designed with entire common path. The effect of sample vibration and the thermal drift could be eliminated. A modified objective was used to perform respectively the measurement beam and the reference beam. The detected signals were processed with phase comparison technique to give a high accuracy. The optical system can be developed to an accessory of the Zeeman laser interferometers." @default.
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- W2082112896 date "1993-10-22" @default.
- W2082112896 modified "2023-09-22" @default.
- W2082112896 title "<title>Laser heterodyne profilometer with several improved techniques</title>" @default.
- W2082112896 doi "https://doi.org/10.1117/12.162104" @default.
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