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- W2082126176 abstract "In this paper, the realization and characterization of a microoptical sensor using the chromatic confocal principle is presented. The sensor head is designed for distance gauging applications in high aspect ratio cavities with a diameter of about 2 mm. The first part of this paper focuses on the design and fabrication process of the hybrid optical benches, which combines refractive and diffractive micro optical components. Very tight tolerances of the optical path are required for the functionality of the sensor. Therefore the alignment structures and mounts between the different optical elements are produced from PMMA using deep X-ray lithography, the first step of the LIGA process. In the second part of this paper the characterization of first prototypes using different light sources are described and results presented." @default.
- W2082126176 created "2016-06-24" @default.
- W2082126176 creator A5000447308 @default.
- W2082126176 creator A5020349580 @default.
- W2082126176 creator A5026541238 @default.
- W2082126176 creator A5032767565 @default.
- W2082126176 creator A5036618413 @default.
- W2082126176 creator A5082716464 @default.
- W2082126176 creator A5088789225 @default.
- W2082126176 creator A5091248704 @default.
- W2082126176 date "2005-06-13" @default.
- W2082126176 modified "2023-09-26" @default.
- W2082126176 title "Confocal micro-optical distance sensor: realization and results" @default.
- W2082126176 doi "https://doi.org/10.1117/12.612418" @default.
- W2082126176 hasPublicationYear "2005" @default.
- W2082126176 type Work @default.
- W2082126176 sameAs 2082126176 @default.
- W2082126176 citedByCount "2" @default.
- W2082126176 crossrefType "proceedings-article" @default.
- W2082126176 hasAuthorship W2082126176A5000447308 @default.
- W2082126176 hasAuthorship W2082126176A5020349580 @default.
- W2082126176 hasAuthorship W2082126176A5026541238 @default.
- W2082126176 hasAuthorship W2082126176A5032767565 @default.
- W2082126176 hasAuthorship W2082126176A5036618413 @default.
- W2082126176 hasAuthorship W2082126176A5082716464 @default.
- W2082126176 hasAuthorship W2082126176A5088789225 @default.
- W2082126176 hasAuthorship W2082126176A5091248704 @default.
- W2082126176 hasConcept C105795698 @default.
- W2082126176 hasConcept C111919701 @default.
- W2082126176 hasConcept C120665830 @default.
- W2082126176 hasConcept C121332964 @default.
- W2082126176 hasConcept C136525101 @default.
- W2082126176 hasConcept C142724271 @default.
- W2082126176 hasConcept C145695476 @default.
- W2082126176 hasConcept C192562407 @default.
- W2082126176 hasConcept C196956537 @default.
- W2082126176 hasConcept C204223013 @default.
- W2082126176 hasConcept C204787440 @default.
- W2082126176 hasConcept C2780841128 @default.
- W2082126176 hasConcept C2781089630 @default.
- W2082126176 hasConcept C31872934 @default.
- W2082126176 hasConcept C33923547 @default.
- W2082126176 hasConcept C41008148 @default.
- W2082126176 hasConcept C49040817 @default.
- W2082126176 hasConcept C71924100 @default.
- W2082126176 hasConcept C98045186 @default.
- W2082126176 hasConceptScore W2082126176C105795698 @default.
- W2082126176 hasConceptScore W2082126176C111919701 @default.
- W2082126176 hasConceptScore W2082126176C120665830 @default.
- W2082126176 hasConceptScore W2082126176C121332964 @default.
- W2082126176 hasConceptScore W2082126176C136525101 @default.
- W2082126176 hasConceptScore W2082126176C142724271 @default.
- W2082126176 hasConceptScore W2082126176C145695476 @default.
- W2082126176 hasConceptScore W2082126176C192562407 @default.
- W2082126176 hasConceptScore W2082126176C196956537 @default.
- W2082126176 hasConceptScore W2082126176C204223013 @default.
- W2082126176 hasConceptScore W2082126176C204787440 @default.
- W2082126176 hasConceptScore W2082126176C2780841128 @default.
- W2082126176 hasConceptScore W2082126176C2781089630 @default.
- W2082126176 hasConceptScore W2082126176C31872934 @default.
- W2082126176 hasConceptScore W2082126176C33923547 @default.
- W2082126176 hasConceptScore W2082126176C41008148 @default.
- W2082126176 hasConceptScore W2082126176C49040817 @default.
- W2082126176 hasConceptScore W2082126176C71924100 @default.
- W2082126176 hasConceptScore W2082126176C98045186 @default.
- W2082126176 hasLocation W20821261761 @default.
- W2082126176 hasOpenAccess W2082126176 @default.
- W2082126176 hasPrimaryLocation W20821261761 @default.
- W2082126176 hasRelatedWork W1963532912 @default.
- W2082126176 hasRelatedWork W1973816007 @default.
- W2082126176 hasRelatedWork W2011226539 @default.
- W2082126176 hasRelatedWork W2104650003 @default.
- W2082126176 hasRelatedWork W2142016339 @default.
- W2082126176 hasRelatedWork W2754462113 @default.
- W2082126176 hasRelatedWork W3039921875 @default.
- W2082126176 hasRelatedWork W4240308501 @default.
- W2082126176 hasRelatedWork W890641783 @default.
- W2082126176 hasRelatedWork W2027277838 @default.
- W2082126176 isParatext "false" @default.
- W2082126176 isRetracted "false" @default.
- W2082126176 magId "2082126176" @default.
- W2082126176 workType "article" @default.