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- W2082273223 abstract "The effect of mechanical stress on the dielectric constant of is experimentally studied. A beam-bending method is used to extract the strain effect coefficient M <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>12</sub> . According to the measurements, the dielectric constant changes linearly with the stress. The value of is shown to be -(0.19 ± 0.01) × 10 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>-21</sup> m <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> /V <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> . The mechanism underlying the phenomena is discussed." @default.
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- W2082273223 date "2010-12-01" @default.
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- W2082273223 title "Strain Effect of the Dielectric Constant in Silicon Dioxide" @default.
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- W2082273223 doi "https://doi.org/10.1109/jmems.2010.2082500" @default.
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