Matches in SemOpenAlex for { <https://semopenalex.org/work/W2082305594> ?p ?o ?g. }
Showing items 1 to 90 of
90
with 100 items per page.
- W2082305594 endingPage "1545" @default.
- W2082305594 startingPage "1543" @default.
- W2082305594 abstract "A selective method of depositing aluminum onto silicon was developed using trimethylaluminum and hydrogen as source gases. Trimethylaluminum was selectively decomposed into excited species through the well controlled radio frequency (13.56 MHz) excited hydrogen plasma of 0.03–0.06 W/cm3. Excited species were reacted on the silicon surface to produce aluminum without carbon incorporation at 230–260 °C. The thermally oxidized silicon dioxide line and space pattern and contact windows were successfully filled with selectively deposited 3000-Å-thick aluminum." @default.
- W2082305594 created "2016-06-24" @default.
- W2082305594 creator A5038147111 @default.
- W2082305594 creator A5038631363 @default.
- W2082305594 creator A5039567595 @default.
- W2082305594 creator A5045856705 @default.
- W2082305594 creator A5076237321 @default.
- W2082305594 date "1990-04-16" @default.
- W2082305594 modified "2023-10-17" @default.
- W2082305594 title "Selective deposition of aluminum from selectively excited metalorganic source by the rf plasma" @default.
- W2082305594 cites W1992872050 @default.
- W2082305594 cites W2021333610 @default.
- W2082305594 cites W2060099176 @default.
- W2082305594 cites W2083449093 @default.
- W2082305594 doi "https://doi.org/10.1063/1.103169" @default.
- W2082305594 hasPublicationYear "1990" @default.
- W2082305594 type Work @default.
- W2082305594 sameAs 2082305594 @default.
- W2082305594 citedByCount "37" @default.
- W2082305594 countsByYear W20823055942013 @default.
- W2082305594 countsByYear W20823055942018 @default.
- W2082305594 countsByYear W20823055942019 @default.
- W2082305594 countsByYear W20823055942020 @default.
- W2082305594 crossrefType "journal-article" @default.
- W2082305594 hasAuthorship W2082305594A5038147111 @default.
- W2082305594 hasAuthorship W2082305594A5038631363 @default.
- W2082305594 hasAuthorship W2082305594A5039567595 @default.
- W2082305594 hasAuthorship W2082305594A5045856705 @default.
- W2082305594 hasAuthorship W2082305594A5076237321 @default.
- W2082305594 hasConcept C107872376 @default.
- W2082305594 hasConcept C113196181 @default.
- W2082305594 hasConcept C121332964 @default.
- W2082305594 hasConcept C151730666 @default.
- W2082305594 hasConcept C178790620 @default.
- W2082305594 hasConcept C179104552 @default.
- W2082305594 hasConcept C181500209 @default.
- W2082305594 hasConcept C184779094 @default.
- W2082305594 hasConcept C185592680 @default.
- W2082305594 hasConcept C191897082 @default.
- W2082305594 hasConcept C192562407 @default.
- W2082305594 hasConcept C2816523 @default.
- W2082305594 hasConcept C49040817 @default.
- W2082305594 hasConcept C512968161 @default.
- W2082305594 hasConcept C513153333 @default.
- W2082305594 hasConcept C544956773 @default.
- W2082305594 hasConcept C62520636 @default.
- W2082305594 hasConcept C64297162 @default.
- W2082305594 hasConcept C82706917 @default.
- W2082305594 hasConcept C86803240 @default.
- W2082305594 hasConceptScore W2082305594C107872376 @default.
- W2082305594 hasConceptScore W2082305594C113196181 @default.
- W2082305594 hasConceptScore W2082305594C121332964 @default.
- W2082305594 hasConceptScore W2082305594C151730666 @default.
- W2082305594 hasConceptScore W2082305594C178790620 @default.
- W2082305594 hasConceptScore W2082305594C179104552 @default.
- W2082305594 hasConceptScore W2082305594C181500209 @default.
- W2082305594 hasConceptScore W2082305594C184779094 @default.
- W2082305594 hasConceptScore W2082305594C185592680 @default.
- W2082305594 hasConceptScore W2082305594C191897082 @default.
- W2082305594 hasConceptScore W2082305594C192562407 @default.
- W2082305594 hasConceptScore W2082305594C2816523 @default.
- W2082305594 hasConceptScore W2082305594C49040817 @default.
- W2082305594 hasConceptScore W2082305594C512968161 @default.
- W2082305594 hasConceptScore W2082305594C513153333 @default.
- W2082305594 hasConceptScore W2082305594C544956773 @default.
- W2082305594 hasConceptScore W2082305594C62520636 @default.
- W2082305594 hasConceptScore W2082305594C64297162 @default.
- W2082305594 hasConceptScore W2082305594C82706917 @default.
- W2082305594 hasConceptScore W2082305594C86803240 @default.
- W2082305594 hasIssue "16" @default.
- W2082305594 hasLocation W20823055941 @default.
- W2082305594 hasOpenAccess W2082305594 @default.
- W2082305594 hasPrimaryLocation W20823055941 @default.
- W2082305594 hasRelatedWork W1987425020 @default.
- W2082305594 hasRelatedWork W1998621903 @default.
- W2082305594 hasRelatedWork W2014863591 @default.
- W2082305594 hasRelatedWork W2039580016 @default.
- W2082305594 hasRelatedWork W2072100342 @default.
- W2082305594 hasRelatedWork W2492272205 @default.
- W2082305594 hasRelatedWork W2899084033 @default.
- W2082305594 hasRelatedWork W3033188224 @default.
- W2082305594 hasRelatedWork W3159386921 @default.
- W2082305594 hasRelatedWork W4233728795 @default.
- W2082305594 hasVolume "56" @default.
- W2082305594 isParatext "false" @default.
- W2082305594 isRetracted "false" @default.
- W2082305594 magId "2082305594" @default.
- W2082305594 workType "article" @default.