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- W2082307554 abstract "IDEALSmile is introduced as a new exposure technique that realizes k<SUB>1</SUB> equals 0.29. In this paper IDEALSmile is targeted for contact hole patterns (C/H). The results validate that it is possible to simultaneously expose not only k<SUB>1</SUB> equals 0.32 half-pitch dense and isolated C/H patterns, but also different pitches using Canon FPA- 5000ES3, which is impossible by conventional methods. Since these results are obtained using a binary mask and modified illumination with single exposure, there are no concerns with regards to a decease in throughput and an increase in cost of ownership. However, one of the issues in fabricating C/H patterns is the mask error enhancement factor (MEEF). Our simulation ha shown that IDEALSmile exhibits good MEEF. Although there are questions regarding optical microlithography for critical C/H patterning, the IDEALSmile exposure method has the potential to be the solution. By attaining k<SUB>1</SUB> equals 0.32, printing 100nm C/H patterns can be achieved with a single exposure using KrF lithography, such as the Canon FPA-5000ES4. Furthermore the IDEALSmile technique using ArF or F2 lithography will be effective for C/H patterns below the 100nm node. There is no doubt that optical microlithography will continue for some time." @default.
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- W2082307554 date "2002-07-31" @default.
- W2082307554 modified "2023-09-23" @default.
- W2082307554 title "New resolution enhancement method realizing the limit of single mask exposure" @default.
- W2082307554 doi "https://doi.org/10.1117/12.477002" @default.
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