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- W2082319982 abstract "The losses of polycrystalline silicon (polySi) waveguides clad by SiO2 are measured by the cutback technique. We report losses of 34 dB/cm at a wavelength of 1.55 μm in waveguides fabricated from chemical mechanical polished polySi deposited at 625 °C. These losses are two orders of magnitude lower than reported absorption measurements for polySi. Waveguides fabricated from unpolished polySi deposited at 625 °C exhibit losses of 77 dB/cm. We find good agreement between calculated and measured losses due to surface scattering." @default.
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- W2082319982 date "1996-04-08" @default.
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- W2082319982 title "Losses in polycrystalline silicon waveguides" @default.
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- W2082319982 doi "https://doi.org/10.1063/1.116300" @default.
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