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- W2082372017 abstract "A metal film in contact with silicon reacts on annealing and in most cases compounds are formed. In the past 20 years many experimental data have been produced in attempts to characterize the phases formed, their sequences, the growth rate, the diffusion species etc. By analysing all these experimental data we try to identify the main physical mechanisms responsible for compound formation." @default.
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- W2082372017 date "1986-06-01" @default.
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- W2082372017 title "Metallurgical aspects of the formation of silicides" @default.
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- W2082372017 doi "https://doi.org/10.1016/0040-6090(86)90154-9" @default.
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