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- W2082482838 abstract "An evaluation of the effect of nitridation temperature on interface layer (IL) quality of Hf-silicate gate dielectric prepared by the atomic layer deposition method has been reported. An increase in IL density and IL roughness was observed by x-ray reflectivity as the nitridation temperature was increased. X-ray photoelectron spectroscopy showed preferential interface reaction at the dielectric-Si interface at higher temperatures. The progressive increase in IL roughness finally led to degradation of the breakdown voltage, a shift in flat band voltage (∼0.54V), and deterioration of electron channel mobility by ∼20% in samples nitrided at 850°C." @default.
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- W2082482838 date "2009-01-01" @default.
- W2082482838 modified "2023-09-26" @default.
- W2082482838 title "Study of interface degradation of Hf-silicate gate dielectrics during thermal nitridation process" @default.
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- W2082482838 doi "https://doi.org/10.1116/1.3043536" @default.
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