Matches in SemOpenAlex for { <https://semopenalex.org/work/W2082494089> ?p ?o ?g. }
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- W2082494089 endingPage "7682" @default.
- W2082494089 startingPage "7682" @default.
- W2082494089 abstract "Tensile-strained single-crystal silicon films on insulator islands have been grown from Si wafer substrates by a process combining selective epitaxial growth (SEG) and pulsed laser crystallization. An amorphous Si film on an insulator island is completely melted by a single excimer laser pulse, leading to the solidification of the molten Si seeded from epitaxially grown single-crystal Si regions. Analyses of the resulting microstructures reveal that the laterally crystallized film is single-crystalline. A tensile strain of up to 8.8×10 -3 within the crystallized region was measured by Raman spectroscopy. The tensile-strained Si film has potential applications in high-performance devices for three-dimensionally stacked integrated circuits." @default.
- W2082494089 created "2016-06-24" @default.
- W2082494089 creator A5018155454 @default.
- W2082494089 creator A5040575776 @default.
- W2082494089 creator A5065621218 @default.
- W2082494089 creator A5076279061 @default.
- W2082494089 creator A5087609640 @default.
- W2082494089 date "2006-10-01" @default.
- W2082494089 modified "2023-09-25" @default.
- W2082494089 title "Tensile-Strained Single-Crystal Si Film on Insulator by Epitaxially Seeded and Laser-Induced Lateral Crystallization" @default.
- W2082494089 cites W1974565903 @default.
- W2082494089 cites W1990919014 @default.
- W2082494089 cites W1998263126 @default.
- W2082494089 cites W2029070382 @default.
- W2082494089 cites W2039370302 @default.
- W2082494089 cites W2061612142 @default.
- W2082494089 cites W2075555994 @default.
- W2082494089 cites W2078199929 @default.
- W2082494089 cites W2497389460 @default.
- W2082494089 doi "https://doi.org/10.1143/jjap.45.7682" @default.
- W2082494089 hasPublicationYear "2006" @default.
- W2082494089 type Work @default.
- W2082494089 sameAs 2082494089 @default.
- W2082494089 citedByCount "3" @default.
- W2082494089 crossrefType "journal-article" @default.
- W2082494089 hasAuthorship W2082494089A5018155454 @default.
- W2082494089 hasAuthorship W2082494089A5040575776 @default.
- W2082494089 hasAuthorship W2082494089A5065621218 @default.
- W2082494089 hasAuthorship W2082494089A5076279061 @default.
- W2082494089 hasAuthorship W2082494089A5087609640 @default.
- W2082494089 hasConcept C110738630 @default.
- W2082494089 hasConcept C112950240 @default.
- W2082494089 hasConcept C120665830 @default.
- W2082494089 hasConcept C121332964 @default.
- W2082494089 hasConcept C127413603 @default.
- W2082494089 hasConcept C159985019 @default.
- W2082494089 hasConcept C160671074 @default.
- W2082494089 hasConcept C185592680 @default.
- W2082494089 hasConcept C192562407 @default.
- W2082494089 hasConcept C203036418 @default.
- W2082494089 hasConcept C2779227376 @default.
- W2082494089 hasConcept C2780477314 @default.
- W2082494089 hasConcept C40003534 @default.
- W2082494089 hasConcept C42360764 @default.
- W2082494089 hasConcept C49040817 @default.
- W2082494089 hasConcept C520434653 @default.
- W2082494089 hasConcept C544956773 @default.
- W2082494089 hasConcept C56052488 @default.
- W2082494089 hasConcept C73922627 @default.
- W2082494089 hasConcept C8010536 @default.
- W2082494089 hasConceptScore W2082494089C110738630 @default.
- W2082494089 hasConceptScore W2082494089C112950240 @default.
- W2082494089 hasConceptScore W2082494089C120665830 @default.
- W2082494089 hasConceptScore W2082494089C121332964 @default.
- W2082494089 hasConceptScore W2082494089C127413603 @default.
- W2082494089 hasConceptScore W2082494089C159985019 @default.
- W2082494089 hasConceptScore W2082494089C160671074 @default.
- W2082494089 hasConceptScore W2082494089C185592680 @default.
- W2082494089 hasConceptScore W2082494089C192562407 @default.
- W2082494089 hasConceptScore W2082494089C203036418 @default.
- W2082494089 hasConceptScore W2082494089C2779227376 @default.
- W2082494089 hasConceptScore W2082494089C2780477314 @default.
- W2082494089 hasConceptScore W2082494089C40003534 @default.
- W2082494089 hasConceptScore W2082494089C42360764 @default.
- W2082494089 hasConceptScore W2082494089C49040817 @default.
- W2082494089 hasConceptScore W2082494089C520434653 @default.
- W2082494089 hasConceptScore W2082494089C544956773 @default.
- W2082494089 hasConceptScore W2082494089C56052488 @default.
- W2082494089 hasConceptScore W2082494089C73922627 @default.
- W2082494089 hasConceptScore W2082494089C8010536 @default.
- W2082494089 hasIssue "10R" @default.
- W2082494089 hasLocation W20824940891 @default.
- W2082494089 hasOpenAccess W2082494089 @default.
- W2082494089 hasPrimaryLocation W20824940891 @default.
- W2082494089 hasRelatedWork W1545496076 @default.
- W2082494089 hasRelatedWork W1975608897 @default.
- W2082494089 hasRelatedWork W1997159941 @default.
- W2082494089 hasRelatedWork W2044949441 @default.
- W2082494089 hasRelatedWork W2332396214 @default.
- W2082494089 hasRelatedWork W2387616028 @default.
- W2082494089 hasRelatedWork W2531393654 @default.
- W2082494089 hasRelatedWork W2795554382 @default.
- W2082494089 hasRelatedWork W3122552578 @default.
- W2082494089 hasRelatedWork W4285731133 @default.
- W2082494089 hasVolume "45" @default.
- W2082494089 isParatext "false" @default.
- W2082494089 isRetracted "false" @default.
- W2082494089 magId "2082494089" @default.
- W2082494089 workType "article" @default.