Matches in SemOpenAlex for { <https://semopenalex.org/work/W2082643908> ?p ?o ?g. }
Showing items 1 to 89 of
89
with 100 items per page.
- W2082643908 endingPage "273" @default.
- W2082643908 startingPage "261" @default.
- W2082643908 abstract "Conformality limitations and film composition variations inside features for films deposited at low pressures are explained using examples of studies which combine transport and reaction simulations of deposition processes and carefully designed experimental work. In the first example, the use of film profile information to decide between two kinetic models for the deposition of SiO2 from TEOS is described. In the second example, composition profiles in sputter deposited Ti-W are explained in terms of titanium re-emission. Combined simulation and experimental studies of film profiles and composition profiles in features is a valuable tool in efforts to arrive at useful kinetic and transport models." @default.
- W2082643908 created "2016-06-24" @default.
- W2082643908 creator A5031622376 @default.
- W2082643908 date "1996-10-01" @default.
- W2082643908 modified "2023-10-16" @default.
- W2082643908 title "CONFORMALITY AND COMPOSITION OF FILMS DEPOSITED AT LOW PRESSURES" @default.
- W2082643908 cites W1965485151 @default.
- W2082643908 cites W1980406875 @default.
- W2082643908 cites W1981988893 @default.
- W2082643908 cites W1989188301 @default.
- W2082643908 cites W1996529300 @default.
- W2082643908 cites W2006016862 @default.
- W2082643908 cites W2006425485 @default.
- W2082643908 cites W2026192871 @default.
- W2082643908 cites W2030647257 @default.
- W2082643908 cites W2039203104 @default.
- W2082643908 cites W2050162673 @default.
- W2082643908 cites W2052777827 @default.
- W2082643908 cites W2062282255 @default.
- W2082643908 cites W2069301630 @default.
- W2082643908 cites W2071985143 @default.
- W2082643908 cites W2124522189 @default.
- W2082643908 cites W2127315011 @default.
- W2082643908 cites W2164010940 @default.
- W2082643908 cites W2331620194 @default.
- W2082643908 doi "https://doi.org/10.1080/00986449608936567" @default.
- W2082643908 hasPublicationYear "1996" @default.
- W2082643908 type Work @default.
- W2082643908 sameAs 2082643908 @default.
- W2082643908 citedByCount "1" @default.
- W2082643908 crossrefType "journal-article" @default.
- W2082643908 hasAuthorship W2082643908A5031622376 @default.
- W2082643908 hasConcept C121332964 @default.
- W2082643908 hasConcept C127313418 @default.
- W2082643908 hasConcept C127413603 @default.
- W2082643908 hasConcept C135889238 @default.
- W2082643908 hasConcept C138885662 @default.
- W2082643908 hasConcept C151730666 @default.
- W2082643908 hasConcept C171250308 @default.
- W2082643908 hasConcept C19067145 @default.
- W2082643908 hasConcept C191897082 @default.
- W2082643908 hasConcept C192562407 @default.
- W2082643908 hasConcept C22423302 @default.
- W2082643908 hasConcept C2816523 @default.
- W2082643908 hasConcept C40231798 @default.
- W2082643908 hasConcept C41895202 @default.
- W2082643908 hasConcept C42360764 @default.
- W2082643908 hasConcept C506065880 @default.
- W2082643908 hasConcept C62520636 @default.
- W2082643908 hasConcept C64297162 @default.
- W2082643908 hasConceptScore W2082643908C121332964 @default.
- W2082643908 hasConceptScore W2082643908C127313418 @default.
- W2082643908 hasConceptScore W2082643908C127413603 @default.
- W2082643908 hasConceptScore W2082643908C135889238 @default.
- W2082643908 hasConceptScore W2082643908C138885662 @default.
- W2082643908 hasConceptScore W2082643908C151730666 @default.
- W2082643908 hasConceptScore W2082643908C171250308 @default.
- W2082643908 hasConceptScore W2082643908C19067145 @default.
- W2082643908 hasConceptScore W2082643908C191897082 @default.
- W2082643908 hasConceptScore W2082643908C192562407 @default.
- W2082643908 hasConceptScore W2082643908C22423302 @default.
- W2082643908 hasConceptScore W2082643908C2816523 @default.
- W2082643908 hasConceptScore W2082643908C40231798 @default.
- W2082643908 hasConceptScore W2082643908C41895202 @default.
- W2082643908 hasConceptScore W2082643908C42360764 @default.
- W2082643908 hasConceptScore W2082643908C506065880 @default.
- W2082643908 hasConceptScore W2082643908C62520636 @default.
- W2082643908 hasConceptScore W2082643908C64297162 @default.
- W2082643908 hasIssue "1" @default.
- W2082643908 hasLocation W20826439081 @default.
- W2082643908 hasOpenAccess W2082643908 @default.
- W2082643908 hasPrimaryLocation W20826439081 @default.
- W2082643908 hasRelatedWork W1969330179 @default.
- W2082643908 hasRelatedWork W1986771336 @default.
- W2082643908 hasRelatedWork W2067393306 @default.
- W2082643908 hasRelatedWork W2073189333 @default.
- W2082643908 hasRelatedWork W2076280938 @default.
- W2082643908 hasRelatedWork W2150801153 @default.
- W2082643908 hasRelatedWork W2328710835 @default.
- W2082643908 hasRelatedWork W2605980348 @default.
- W2082643908 hasRelatedWork W3111947101 @default.
- W2082643908 hasRelatedWork W4254471017 @default.
- W2082643908 hasVolume "152-153" @default.
- W2082643908 isParatext "false" @default.
- W2082643908 isRetracted "false" @default.
- W2082643908 magId "2082643908" @default.
- W2082643908 workType "article" @default.