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- W2082680025 abstract "Micro-electro-mechanical systems (MEMS) were used to fabricate a device with passive fluidic components that amplified the motion associated with ultrasonic waves in water. Two types of fluid components were etched in silicon, an acoustic horn, and an acoustic resonator. The fluid motion was detected by a small silicon diaphragm which moved with the sound wave. The diaphragm motion was measured with a laser Doppler vibrometer. Experiments were carried out for acoustic excitations in the frequency region of 0.5 to 5 MHz. Over this frequency range uniform thickness diaphragms were found to support multiple resonance modes and were found to be poor sensing surfaces. Composite diaphragms, with a stiff pedestal supported by compliant edge fixtures, provided a superior sensing surface. The motion of the diaphragm placed at the throat of an acoustic horn demonstrated broadband amplification with a gain of 6. An organ-pipe type resonator provided a narrow-band gain of 3. The horn and resonator structures could be incorporated into most types of MEMS hydrophone devices which use diaphragms to sense sound waves. [Work supported by DARPA.]" @default.
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- W2082680025 date "2001-05-01" @default.
- W2082680025 modified "2023-09-25" @default.
- W2082680025 title "Microfluidic amplification of ultrasound with application to MEMS hydrophones" @default.
- W2082680025 doi "https://doi.org/10.1121/1.4744253" @default.
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