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- W2082697188 abstract "Thermal and ion-induced reactions on a chlorine (Cl)-adsorbed GaAs(100) surface have been studied by metastable-atom de-excitation spectroscopy. The results show that Cl is bound to one site of a top-layer Ga atom, forming mono-chloride (GaCl), by exposing the surface to molecular chlorine ( Cl 2 ) of less than 228 Langmuir (L) at 143 K. As the Cl 2 exposure dosage is further increased, one more Cl atom is bound to another site of the Ga atom of GaCl, forming di-chloride ( GaCl 2 ). GaCl 2 is removed at a lower temperature than GaCl when heating the sample. On the other hand, both the chlorides are removed simultaneously when irradiated with Ar + ions at a kinetic energy of 500 eV. The difference between the two types of reactions is discussed in terms of desorption behaviors of the two chlorides." @default.
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- W2082697188 date "1995-07-01" @default.
- W2082697188 modified "2023-10-18" @default.
- W2082697188 title "Thermal and Ion-Induced Reactions on a Chlorine-Adsorbed GaAs(100) Surface Studied by Metastable-Atom De-excitation Electron Spectroscopy" @default.
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- W2082697188 doi "https://doi.org/10.1143/jjap.34.3631" @default.
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