Matches in SemOpenAlex for { <https://semopenalex.org/work/W2082773071> ?p ?o ?g. }
Showing items 1 to 82 of
82
with 100 items per page.
- W2082773071 endingPage "L876" @default.
- W2082773071 startingPage "L876" @default.
- W2082773071 abstract "The C49 and C54 fractions in TiSi 2 are examined quantitatively by the grazing incidence X-ray diffraction method in order to study the effect of BF + 2 implanted in Si substrates and linewidth on TiSi 2 silicidation and the phase transition from C49 to C54. B F + 2 implantation suppresses both silicidation and the phase transition, and the phase transition is also markedly suppressed on narrow lines. As a result, all the C49 TiSi 2 remains for 0.5 µ m lines with B F + 2 dose of 2×10 15 cm -2 after the 2nd rapid thermal annealing (800° C, 30 s). Furthermore, we have found that the grains of C49 TiSi 2 are preferentially oriented to highly implanted substrates. This indicates that the phase of these grains is stable thermally and difficult to transform to C54 phase." @default.
- W2082773071 created "2016-06-24" @default.
- W2082773071 creator A5001024800 @default.
- W2082773071 creator A5020187609 @default.
- W2082773071 creator A5041229806 @default.
- W2082773071 creator A5089014467 @default.
- W2082773071 date "1995-07-01" @default.
- W2082773071 modified "2023-10-18" @default.
- W2082773071 title "Grazing Incidence X-Ray Diffraction Study on Effect of Implanted BF<sup>+</sup> <sub>2</sub> and Linewidth on Titanium Silicidation" @default.
- W2082773071 cites W1972129519 @default.
- W2082773071 cites W1988253350 @default.
- W2082773071 cites W1998933732 @default.
- W2082773071 cites W2004822714 @default.
- W2082773071 cites W2008374941 @default.
- W2082773071 cites W2079838481 @default.
- W2082773071 cites W2080658327 @default.
- W2082773071 cites W2110579838 @default.
- W2082773071 cites W2270222656 @default.
- W2082773071 cites W2322287557 @default.
- W2082773071 doi "https://doi.org/10.1143/jjap.34.l876" @default.
- W2082773071 hasPublicationYear "1995" @default.
- W2082773071 type Work @default.
- W2082773071 sameAs 2082773071 @default.
- W2082773071 citedByCount "3" @default.
- W2082773071 crossrefType "journal-article" @default.
- W2082773071 hasAuthorship W2082773071A5001024800 @default.
- W2082773071 hasAuthorship W2082773071A5020187609 @default.
- W2082773071 hasAuthorship W2082773071A5041229806 @default.
- W2082773071 hasAuthorship W2082773071A5089014467 @default.
- W2082773071 hasConcept C113196181 @default.
- W2082773071 hasConcept C120665830 @default.
- W2082773071 hasConcept C121332964 @default.
- W2082773071 hasConcept C142181693 @default.
- W2082773071 hasConcept C178790620 @default.
- W2082773071 hasConcept C185592680 @default.
- W2082773071 hasConcept C191897082 @default.
- W2082773071 hasConcept C192562407 @default.
- W2082773071 hasConcept C207114421 @default.
- W2082773071 hasConcept C2777855556 @default.
- W2082773071 hasConcept C43617362 @default.
- W2082773071 hasConcept C44280652 @default.
- W2082773071 hasConcept C50515024 @default.
- W2082773071 hasConcept C506065880 @default.
- W2082773071 hasConcept C520434653 @default.
- W2082773071 hasConcept C8010536 @default.
- W2082773071 hasConceptScore W2082773071C113196181 @default.
- W2082773071 hasConceptScore W2082773071C120665830 @default.
- W2082773071 hasConceptScore W2082773071C121332964 @default.
- W2082773071 hasConceptScore W2082773071C142181693 @default.
- W2082773071 hasConceptScore W2082773071C178790620 @default.
- W2082773071 hasConceptScore W2082773071C185592680 @default.
- W2082773071 hasConceptScore W2082773071C191897082 @default.
- W2082773071 hasConceptScore W2082773071C192562407 @default.
- W2082773071 hasConceptScore W2082773071C207114421 @default.
- W2082773071 hasConceptScore W2082773071C2777855556 @default.
- W2082773071 hasConceptScore W2082773071C43617362 @default.
- W2082773071 hasConceptScore W2082773071C44280652 @default.
- W2082773071 hasConceptScore W2082773071C50515024 @default.
- W2082773071 hasConceptScore W2082773071C506065880 @default.
- W2082773071 hasConceptScore W2082773071C520434653 @default.
- W2082773071 hasConceptScore W2082773071C8010536 @default.
- W2082773071 hasIssue "7B" @default.
- W2082773071 hasLocation W20827730711 @default.
- W2082773071 hasOpenAccess W2082773071 @default.
- W2082773071 hasPrimaryLocation W20827730711 @default.
- W2082773071 hasRelatedWork W1974113300 @default.
- W2082773071 hasRelatedWork W1995917668 @default.
- W2082773071 hasRelatedWork W2017776647 @default.
- W2082773071 hasRelatedWork W2033600573 @default.
- W2082773071 hasRelatedWork W2052377941 @default.
- W2082773071 hasRelatedWork W2087974315 @default.
- W2082773071 hasRelatedWork W2130293821 @default.
- W2082773071 hasRelatedWork W2360954447 @default.
- W2082773071 hasRelatedWork W2564907064 @default.
- W2082773071 hasRelatedWork W3081649919 @default.
- W2082773071 hasVolume "34" @default.
- W2082773071 isParatext "false" @default.
- W2082773071 isRetracted "false" @default.
- W2082773071 magId "2082773071" @default.
- W2082773071 workType "article" @default.