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- W2082834262 abstract "We have studied the electron emission behavior of the diamondlike carbon (DLC) films by plasma enhanced chemical vapor deposition using a layer-by-layer deposition, in which the deposition of a thin layer of DLC and a CF4 plasma exposure on its surface were carried out alternatively. The electron emission current increases with CF4 plasma exposure time. The increase in emission current appears to be due to the n-type behavior of the DLC." @default.
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- W2082834262 date "1997-03-17" @default.
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- W2082834262 title "Deposition ofn-type diamondlike carbon by using the layer-by-layer technique and its electron emission properties" @default.
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- W2082834262 doi "https://doi.org/10.1063/1.119076" @default.
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