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• W2082874843 abstract "Aluminum nitride thin-film deposition resulting from addition of triisobutyle aluminum (TIBA) to the afterglow of an N 2 microwave plasma has been investigated. Chemiluminescence spectra of the downstream reaction indicated that the substrate temperature is one parameter for the decomposition of TIBA. The activation energy for plasma-assisted TIBA decomposition is also evaluated by the chemiluminescence spectra and found to be about 14.8 kJ/mol." @default.
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• W2082874843 date "1992-04-01" @default.
• W2082874843 modified "2023-10-16" @default.
• W2082874843 title "Deposition of Aluminum Nitride by Remote Plasma-Enhanced Chemical Vapor Deposition Using Triisobutyle Aluminum" @default.
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• W2082874843 doi "https://doi.org/10.1143/jjap.31.l423" @default.
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