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- W2082897173 abstract "A single-crystal silicon resonant bulk acoustic mass sensor with a measured resolution of 125pg∕cm2 is presented. The mass sensor comprises a micromachined silicon plate that is excited in the square-extensional bulk acoustic resonant mode at a frequency of 2.182MHz, with a quality factor exceeding 106. The mass sensor has a measured mass to frequency shift sensitivity of 132Hzcm2∕μg. The resonator element is embedded in a feedback loop of an electronic amplifier to implement an oscillator with a short term frequency stability of better than 7ppb at an operating pressure of 3.8mTorr." @default.
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- W2082897173 date "2007-12-03" @default.
- W2082897173 modified "2023-10-14" @default.
- W2082897173 title "Ultrasensitive mass balance based on a bulk acoustic mode single-crystal silicon resonator" @default.
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- W2082897173 doi "https://doi.org/10.1063/1.2822405" @default.
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