Matches in SemOpenAlex for { <https://semopenalex.org/work/W2082899211> ?p ?o ?g. }
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- W2082899211 endingPage "1036" @default.
- W2082899211 startingPage "1034" @default.
- W2082899211 abstract "We have used the force exerted on a neutral atom by an optical standing wave to focus a neutral atomic beam into a grating structure that is deposited on a substrate. We have made gratings with pitch of 294 nm, linewidths of δ=40–45 nm and contrast ≳10:1, over an area of 7.6 mm2. We discuss the conditions needed to make the narrowest structures, and how these conditions affect the performance of this technique as a lithography tool. We also show depositions that have lower resolution, δ≊80 nm, but could cover an area greater than 3×104 mm2." @default.
- W2082899211 created "2016-06-24" @default.
- W2082899211 creator A5016484755 @default.
- W2082899211 creator A5069918566 @default.
- W2082899211 creator A5082072273 @default.
- W2082899211 date "1996-02-19" @default.
- W2082899211 modified "2023-10-14" @default.
- W2082899211 title "Laser focused atomic deposition: A new lithography tool" @default.
- W2082899211 cites W1971879022 @default.
- W2082899211 cites W2056410020 @default.
- W2082899211 doi "https://doi.org/10.1063/1.116239" @default.
- W2082899211 hasPublicationYear "1996" @default.
- W2082899211 type Work @default.
- W2082899211 sameAs 2082899211 @default.
- W2082899211 citedByCount "23" @default.
- W2082899211 countsByYear W20828992112013 @default.
- W2082899211 crossrefType "journal-article" @default.
- W2082899211 hasAuthorship W2082899211A5016484755 @default.
- W2082899211 hasAuthorship W2082899211A5069918566 @default.
- W2082899211 hasAuthorship W2082899211A5082072273 @default.
- W2082899211 hasConcept C111368507 @default.
- W2082899211 hasConcept C120665830 @default.
- W2082899211 hasConcept C121332964 @default.
- W2082899211 hasConcept C127313418 @default.
- W2082899211 hasConcept C138268822 @default.
- W2082899211 hasConcept C149635348 @default.
- W2082899211 hasConcept C151730666 @default.
- W2082899211 hasConcept C154945302 @default.
- W2082899211 hasConcept C171250308 @default.
- W2082899211 hasConcept C192562407 @default.
- W2082899211 hasConcept C204223013 @default.
- W2082899211 hasConcept C2777289219 @default.
- W2082899211 hasConcept C2777813233 @default.
- W2082899211 hasConcept C2779227376 @default.
- W2082899211 hasConcept C2816523 @default.
- W2082899211 hasConcept C2992309020 @default.
- W2082899211 hasConcept C41008148 @default.
- W2082899211 hasConcept C41794268 @default.
- W2082899211 hasConcept C49040817 @default.
- W2082899211 hasConcept C520434653 @default.
- W2082899211 hasConcept C53524968 @default.
- W2082899211 hasConcept C58312451 @default.
- W2082899211 hasConcept C64297162 @default.
- W2082899211 hasConcept C70520399 @default.
- W2082899211 hasConcept C86803240 @default.
- W2082899211 hasConceptScore W2082899211C111368507 @default.
- W2082899211 hasConceptScore W2082899211C120665830 @default.
- W2082899211 hasConceptScore W2082899211C121332964 @default.
- W2082899211 hasConceptScore W2082899211C127313418 @default.
- W2082899211 hasConceptScore W2082899211C138268822 @default.
- W2082899211 hasConceptScore W2082899211C149635348 @default.
- W2082899211 hasConceptScore W2082899211C151730666 @default.
- W2082899211 hasConceptScore W2082899211C154945302 @default.
- W2082899211 hasConceptScore W2082899211C171250308 @default.
- W2082899211 hasConceptScore W2082899211C192562407 @default.
- W2082899211 hasConceptScore W2082899211C204223013 @default.
- W2082899211 hasConceptScore W2082899211C2777289219 @default.
- W2082899211 hasConceptScore W2082899211C2777813233 @default.
- W2082899211 hasConceptScore W2082899211C2779227376 @default.
- W2082899211 hasConceptScore W2082899211C2816523 @default.
- W2082899211 hasConceptScore W2082899211C2992309020 @default.
- W2082899211 hasConceptScore W2082899211C41008148 @default.
- W2082899211 hasConceptScore W2082899211C41794268 @default.
- W2082899211 hasConceptScore W2082899211C49040817 @default.
- W2082899211 hasConceptScore W2082899211C520434653 @default.
- W2082899211 hasConceptScore W2082899211C53524968 @default.
- W2082899211 hasConceptScore W2082899211C58312451 @default.
- W2082899211 hasConceptScore W2082899211C64297162 @default.
- W2082899211 hasConceptScore W2082899211C70520399 @default.
- W2082899211 hasConceptScore W2082899211C86803240 @default.
- W2082899211 hasIssue "8" @default.
- W2082899211 hasLocation W20828992111 @default.
- W2082899211 hasOpenAccess W2082899211 @default.
- W2082899211 hasPrimaryLocation W20828992111 @default.
- W2082899211 hasRelatedWork W1998117808 @default.
- W2082899211 hasRelatedWork W2007880660 @default.
- W2082899211 hasRelatedWork W2020574739 @default.
- W2082899211 hasRelatedWork W2021957003 @default.
- W2082899211 hasRelatedWork W2025113045 @default.
- W2082899211 hasRelatedWork W2135099569 @default.
- W2082899211 hasRelatedWork W2363991779 @default.
- W2082899211 hasRelatedWork W2478487396 @default.
- W2082899211 hasRelatedWork W2503993276 @default.
- W2082899211 hasRelatedWork W806091262 @default.
- W2082899211 hasVolume "68" @default.
- W2082899211 isParatext "false" @default.
- W2082899211 isRetracted "false" @default.
- W2082899211 magId "2082899211" @default.
- W2082899211 workType "article" @default.