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- W2082912073 abstract "At the October 1997 NIST “Workshop for Thin Dielectric Film Metrology”, uses of ellipsometers, and the role of standard materials for semiconductor metrology were two of several important topics discussed. Much of the workshop discussion centered on metrology for thin gate oxides. This paper is an extension of some of the topics discussed at that workshop." @default.
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- W2082912073 date "1998-01-01" @default.
- W2082912073 modified "2023-09-24" @default.
- W2082912073 title "Metrology standards with ellipsometers" @default.
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- W2082912073 doi "https://doi.org/10.1063/1.56818" @default.
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