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- W2082938863 abstract "In this paper the regimes of energy input to pseudospark discharge plasma in various stages of its development and EUV radiation behavior are investigated. The data for different temporal discharge stages are presented. It was shown, that the main fraction of EUV radiation energy is generated in the superdense glow discharge phase and depend on the value of energy input in this stage. Influence of electric circuit parameters and hollow cathode configuration on conversion efficiency has been investigated. The ways of conversion efficiency value enhancing have been analyzed." @default.
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- W2082938863 date "2006-01-01" @default.
- W2082938863 modified "2023-09-23" @default.
- W2082938863 title "Energy Input Regimes in the EUV Radiation Source Based on the Pseudospark Discharge" @default.
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- W2082938863 doi "https://doi.org/10.1109/deiv.2006.357237" @default.
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