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- W2082957398 abstract "Abstract High-dose and multi-energy aluminum implantation of α-SiC (0001) was carried out to achieve a broad aluminum distribution extending from the sample surface to a depth of approximately 350 nm. Oxidation resistance of the implanted crystals was studied in 1 atm flowing oxygen at 1300°C. Aluminum implantation resulted in a 45% improvement in the oxidation resistance of α-SiC as compared with unimplanted crystals due to the formation of structurally dense mullite (3A1 2 O 3 .2SiO 2 ) in the oxidation scale." @default.
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- W2082957398 date "1993-01-01" @default.
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- W2082957398 title "Enhancement of Oxidation Resistance of Silicon Carbide by High-Dose and Multi-Energy Aluminum Implantation" @default.
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- W2082957398 doi "https://doi.org/10.1557/proc-327-281" @default.
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