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- W2083111213 abstract "A novel phase change material, Si<sub>2</sub>Sb<sub>2</sub>Te<sub>3</sub> has been reported to show good phase change abilities. Etching of this material is a critical step in the fabrication of phase change memory devices. In this paper, the characteristics of Si<sub>2</sub>Sb<sub>2</sub>Te<sub>3</sub> etched in CF<sub>4</sub>/Ar atmosphere are investigated. The influence of the etching rate and surface roughness with different CF<sub>4</sub>/Ar ratio, pressure, and power are systematically studied. Furthermore, our X-ray photoelectron spectroscopy test results show that Te is the bottleneck to accelerating the etching rate." @default.
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- W2083111213 date "2013-01-24" @default.
- W2083111213 modified "2023-09-27" @default.
- W2083111213 title "Reactive etching of a novel phase change material Si2Sb2Te3" @default.
- W2083111213 doi "https://doi.org/10.1117/12.2016674" @default.
- W2083111213 hasPublicationYear "2013" @default.
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