FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2083114235> ?p ?o ?g. }

• W2083114235 endingPage "577" @default.
• W2083114235 startingPage "567" @default.
• W2083114235 abstract "An ion beam sputtering apparatus with multiple-ion sources was especially designed to study the film preparation with respect to their chemical structure. Ceramic thin films of TiN, AlN and carbon were prepared by ion beam sputtering of metallic targets. These films were amorphous even under electron microscopic disfraction up to a temperature as high as 1000°C. The composition of thin films which had been intended to produce aluminum nitride strongly depended on the amount of oxygen present in the vacuum. The coordination number of aluminum in aluminum nitride films changed from four to six, depending on the atmospheric chemical composition and sputtering ion sources. When the titanium target was sputtered in the nitrogen atmosphere by an argon ion beam, both TiN and Ti2N were deposited. The composition could be controlled by changing the partial pressure of argon and nitrogen. The carbon films produced by sputtering the graphite target was a nonconductor, which was considered to be typical of i-carbon. The X-ray spectrum of the carbon film showed a high energy component comparable to that seen in diamond. When the substrate was heated during deposition, the resistance of the deposited carbon films decreased remarkably. Random arrays of small crystallites were characteristic of the i-carbon. Heating the substrate made the crystallites grow to a certain extent." @default.
• W2083114235 created "2016-06-24" @default.
• W2083114235 creator A5001459989 @default.
• W2083114235 creator A5051329536 @default.
• W2083114235 creator A5082811963 @default.
• W2083114235 creator A5083203612 @default.
• W2083114235 date "1988-09-01" @default.
• W2083114235 modified "2023-09-24" @default.
• W2083114235 title "Formation and structure of ceramic thin films deposited by ion beam sputtering" @default.
• W2083114235 cites W1970658911 @default.
• W2083114235 cites W2010911683 @default.
• W2083114235 cites W2055606813 @default.
• W2083114235 cites W2072398410 @default.
• W2083114235 cites W2072600729 @default.
• W2083114235 doi "https://doi.org/10.1016/0169-4332(88)90354-6" @default.
• W2083114235 hasPublicationYear "1988" @default.
• W2083114235 type Work @default.
• W2083114235 sameAs 2083114235 @default.
• W2083114235 citedByCount "4" @default.
• W2083114235 crossrefType "journal-article" @default.
• W2083114235 hasAuthorship W2083114235A5001459989 @default.
• W2083114235 hasAuthorship W2083114235A5051329536 @default.
• W2083114235 hasAuthorship W2083114235A5082811963 @default.
• W2083114235 hasAuthorship W2083114235A5083203612 @default.
• W2083114235 hasConcept C104779481 @default.
• W2083114235 hasConcept C111368507 @default.
• W2083114235 hasConcept C113196181 @default.
• W2083114235 hasConcept C127313418 @default.
• W2083114235 hasConcept C127413603 @default.
• W2083114235 hasConcept C134132462 @default.
• W2083114235 hasConcept C137637335 @default.
• W2083114235 hasConcept C140205800 @default.
• W2083114235 hasConcept C145148216 @default.
• W2083114235 hasConcept C159985019 @default.
• W2083114235 hasConcept C171250308 @default.
• W2083114235 hasConcept C178790620 @default.
• W2083114235 hasConcept C185592680 @default.
• W2083114235 hasConcept C19067145 @default.
• W2083114235 hasConcept C191897082 @default.
• W2083114235 hasConcept C192562407 @default.
• W2083114235 hasConcept C194760766 @default.
• W2083114235 hasConcept C201931942 @default.
• W2083114235 hasConcept C22423302 @default.
• W2083114235 hasConcept C2777289219 @default.
• W2083114235 hasConcept C2779227376 @default.
• W2083114235 hasConcept C2781463530 @default.
• W2083114235 hasConcept C42360764 @default.
• W2083114235 hasConcept C43617362 @default.
• W2083114235 hasConcept C50774322 @default.
• W2083114235 hasConcept C525849907 @default.
• W2083114235 hasConcept C547737533 @default.
• W2083114235 hasConcept C56052488 @default.
• W2083114235 hasConcept C61427134 @default.
• W2083114235 hasConcept C75937256 @default.
• W2083114235 hasConcept C8010536 @default.
• W2083114235 hasConceptScore W2083114235C104779481 @default.
• W2083114235 hasConceptScore W2083114235C111368507 @default.
• W2083114235 hasConceptScore W2083114235C113196181 @default.
• W2083114235 hasConceptScore W2083114235C127313418 @default.
• W2083114235 hasConceptScore W2083114235C127413603 @default.
• W2083114235 hasConceptScore W2083114235C134132462 @default.
• W2083114235 hasConceptScore W2083114235C137637335 @default.
• W2083114235 hasConceptScore W2083114235C140205800 @default.
• W2083114235 hasConceptScore W2083114235C145148216 @default.
• W2083114235 hasConceptScore W2083114235C159985019 @default.
• W2083114235 hasConceptScore W2083114235C171250308 @default.
• W2083114235 hasConceptScore W2083114235C178790620 @default.
• W2083114235 hasConceptScore W2083114235C185592680 @default.
• W2083114235 hasConceptScore W2083114235C19067145 @default.
• W2083114235 hasConceptScore W2083114235C191897082 @default.
• W2083114235 hasConceptScore W2083114235C192562407 @default.
• W2083114235 hasConceptScore W2083114235C194760766 @default.
• W2083114235 hasConceptScore W2083114235C201931942 @default.
• W2083114235 hasConceptScore W2083114235C22423302 @default.
• W2083114235 hasConceptScore W2083114235C2777289219 @default.
• W2083114235 hasConceptScore W2083114235C2779227376 @default.
• W2083114235 hasConceptScore W2083114235C2781463530 @default.
• W2083114235 hasConceptScore W2083114235C42360764 @default.
• W2083114235 hasConceptScore W2083114235C43617362 @default.
• W2083114235 hasConceptScore W2083114235C50774322 @default.
• W2083114235 hasConceptScore W2083114235C525849907 @default.
• W2083114235 hasConceptScore W2083114235C547737533 @default.
• W2083114235 hasConceptScore W2083114235C56052488 @default.
• W2083114235 hasConceptScore W2083114235C61427134 @default.
• W2083114235 hasConceptScore W2083114235C75937256 @default.
• W2083114235 hasConceptScore W2083114235C8010536 @default.
• W2083114235 hasLocation W20831142351 @default.
• W2083114235 hasOpenAccess W2083114235 @default.
• W2083114235 hasPrimaryLocation W20831142351 @default.
• W2083114235 hasRelatedWork W2024792716 @default.
• W2083114235 hasRelatedWork W2069240814 @default.
• W2083114235 hasRelatedWork W2077106834 @default.
• W2083114235 hasRelatedWork W2098368612 @default.
• W2083114235 hasRelatedWork W2364045966 @default.
• W2083114235 hasRelatedWork W2380860136 @default.
• W2083114235 hasRelatedWork W2387277975 @default.
• W2083114235 hasRelatedWork W2392638099 @default.
• W2083114235 hasRelatedWork W2971530704 @default.

• next