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- W2083125087 abstract "Silicon nanowire waveguides are fabricated on silicon-on-insulator (SOI) wafers with 0.13 μm CMOS technology. Propagation losses of 2.4 dB/cm and 0.59 dB/cm are obtained for TE and TM modes, respectively, for the 500 nm × 220 nm channel waveguide." @default.
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- W2083125087 date "2012-01-01" @default.
- W2083125087 modified "2023-09-26" @default.
- W2083125087 title "Low Loss Silicon Nanowire Waveguide Fabricated with 0.13μm CMOS Technology" @default.
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- W2083125087 doi "https://doi.org/10.1364/acpc.2012.ath1b.2" @default.
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