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- W2083156735 abstract "A torsional micromechanical scanner was fabricated using photosensitive polymer (SU-8). The scanner consists of two parts; top layer (micro mirror) and bottom layer (an anchor and electrodes). The SU-8 scanner is actuated by electrostatic force generated from the gap-closing electrodes. For the fabricated optical scanner with the mirror area of 3times3 mm <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> , the experimentally determined scanning angles were 0.85deg and 3.1deg for 60 Hz (non-resonant) and 1.13 kHz (resonant) driving frequencies, respectively, at an input voltage of 160 V. A polymer-based actuator offers advantages including a low-cost fabrication process and low frequency operation." @default.
- W2083156735 created "2016-06-24" @default.
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- W2083156735 date "2009-01-01" @default.
- W2083156735 modified "2023-09-26" @default.
- W2083156735 title "Polymeric (SU-8) Optical Microscanner Driven by Electrostatic Actuation" @default.
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- W2083156735 doi "https://doi.org/10.1109/memsys.2009.4805543" @default.
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