Matches in SemOpenAlex for { <https://semopenalex.org/work/W2083173886> ?p ?o ?g. }
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- W2083173886 endingPage "L2109" @default.
- W2083173886 startingPage "L2109" @default.
- W2083173886 abstract "The degradation of gate oxide integrity (GOI) by metal impurities on Si wafers was studied. Ni and Cu tended to precipitate at the Si surface after high-temperature annealing. When these precipitates existed before gate oxidation, they penetrated into the gate oxide film and degraded GOI. Fe tended to remain in the oxide film after oxidation and degraded GOI. The degradation was observed for annealed samples when the surface metal concentration exceeded 1.0×10 12 atoms/cm 2 of Ni or 5.0×10 12 atoms/cm 2 of Cu. It was also observed with contamination of 1.0×10 13 atoms/cm 2 of Fe without annealing." @default.
- W2083173886 created "2016-06-24" @default.
- W2083173886 creator A5017635136 @default.
- W2083173886 creator A5022695559 @default.
- W2083173886 creator A5030850577 @default.
- W2083173886 creator A5076409348 @default.
- W2083173886 date "1989-12-01" @default.
- W2083173886 modified "2023-10-16" @default.
- W2083173886 title "Degradation of Gate Oxide Integrity by Metal Impurities" @default.
- W2083173886 cites W1974826895 @default.
- W2083173886 cites W2068719620 @default.
- W2083173886 cites W2089720743 @default.
- W2083173886 cites W2142430885 @default.
- W2083173886 cites W2324795564 @default.
- W2083173886 cites W4243101403 @default.
- W2083173886 doi "https://doi.org/10.1143/jjap.28.l2109" @default.
- W2083173886 hasPublicationYear "1989" @default.
- W2083173886 type Work @default.
- W2083173886 sameAs 2083173886 @default.
- W2083173886 citedByCount "43" @default.
- W2083173886 countsByYear W20831738862017 @default.
- W2083173886 countsByYear W20831738862018 @default.
- W2083173886 countsByYear W20831738862023 @default.
- W2083173886 crossrefType "journal-article" @default.
- W2083173886 hasAuthorship W2083173886A5017635136 @default.
- W2083173886 hasAuthorship W2083173886A5022695559 @default.
- W2083173886 hasAuthorship W2083173886A5030850577 @default.
- W2083173886 hasAuthorship W2083173886A5076409348 @default.
- W2083173886 hasConcept C107872376 @default.
- W2083173886 hasConcept C113196181 @default.
- W2083173886 hasConcept C119599485 @default.
- W2083173886 hasConcept C127413603 @default.
- W2083173886 hasConcept C160671074 @default.
- W2083173886 hasConcept C165801399 @default.
- W2083173886 hasConcept C171250308 @default.
- W2083173886 hasConcept C172385210 @default.
- W2083173886 hasConcept C178790620 @default.
- W2083173886 hasConcept C179104552 @default.
- W2083173886 hasConcept C185592680 @default.
- W2083173886 hasConcept C191897082 @default.
- W2083173886 hasConcept C192562407 @default.
- W2083173886 hasConcept C2361726 @default.
- W2083173886 hasConcept C24326235 @default.
- W2083173886 hasConcept C2777855556 @default.
- W2083173886 hasConcept C2779679103 @default.
- W2083173886 hasConcept C2779851234 @default.
- W2083173886 hasConcept C544153396 @default.
- W2083173886 hasConcept C71987851 @default.
- W2083173886 hasConceptScore W2083173886C107872376 @default.
- W2083173886 hasConceptScore W2083173886C113196181 @default.
- W2083173886 hasConceptScore W2083173886C119599485 @default.
- W2083173886 hasConceptScore W2083173886C127413603 @default.
- W2083173886 hasConceptScore W2083173886C160671074 @default.
- W2083173886 hasConceptScore W2083173886C165801399 @default.
- W2083173886 hasConceptScore W2083173886C171250308 @default.
- W2083173886 hasConceptScore W2083173886C172385210 @default.
- W2083173886 hasConceptScore W2083173886C178790620 @default.
- W2083173886 hasConceptScore W2083173886C179104552 @default.
- W2083173886 hasConceptScore W2083173886C185592680 @default.
- W2083173886 hasConceptScore W2083173886C191897082 @default.
- W2083173886 hasConceptScore W2083173886C192562407 @default.
- W2083173886 hasConceptScore W2083173886C2361726 @default.
- W2083173886 hasConceptScore W2083173886C24326235 @default.
- W2083173886 hasConceptScore W2083173886C2777855556 @default.
- W2083173886 hasConceptScore W2083173886C2779679103 @default.
- W2083173886 hasConceptScore W2083173886C2779851234 @default.
- W2083173886 hasConceptScore W2083173886C544153396 @default.
- W2083173886 hasConceptScore W2083173886C71987851 @default.
- W2083173886 hasIssue "12A" @default.
- W2083173886 hasLocation W20831738861 @default.
- W2083173886 hasOpenAccess W2083173886 @default.
- W2083173886 hasPrimaryLocation W20831738861 @default.
- W2083173886 hasRelatedWork W1570483242 @default.
- W2083173886 hasRelatedWork W1977466162 @default.
- W2083173886 hasRelatedWork W1991958344 @default.
- W2083173886 hasRelatedWork W2000282195 @default.
- W2083173886 hasRelatedWork W2002253668 @default.
- W2083173886 hasRelatedWork W2015443244 @default.
- W2083173886 hasRelatedWork W2052948585 @default.
- W2083173886 hasRelatedWork W2083173886 @default.
- W2083173886 hasRelatedWork W2109026317 @default.
- W2083173886 hasRelatedWork W2129594288 @default.
- W2083173886 hasVolume "28" @default.
- W2083173886 isParatext "false" @default.
- W2083173886 isRetracted "false" @default.
- W2083173886 magId "2083173886" @default.
- W2083173886 workType "article" @default.