FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2083190010> ?p ?o ?g. }

• W2083190010 endingPage "450" @default.
• W2083190010 startingPage "447" @default.
• W2083190010 abstract "The deposition of silicon alloy thin films at room temperature is of increasing interest for various applications, such as functional, protective and optical coatings on polymers. In this work an integrated distributed electron cyclotron resonance (IDECR) high density plasma reactor is used for the deposition of SiOxNy thin films with variable optical properties. The reactor has planar geometry and is scalable for large area applications. Properties of material are analyzed with in situ UV–Visible ellipsometry, ex situ infrared transmission, RBS and ERDA measurements. Without substrate heating, dense, non-absorbing and low hydrogen content stoichiometric films of SiO2 and Si3N4 are grown from the mixture of SiH4, O2 and N2. Deposition rates are between 0.5 and 5 nm/s for Si3N4 and SiO2, respectively. By changing the nitrogen to oxygen gas flow ratio the refractive index (measured at 632.8 nm) can be smoothly and reproducibly tuned from 1.96 to 1.46. The correlation between material properties and plasma parameters indicates that the silane partial pressure influences the hydrogen incorporation into the silicon nitride films." @default.
• W2083190010 created "2016-06-24" @default.
• W2083190010 creator A5010597793 @default.
• W2083190010 creator A5052833091 @default.
• W2083190010 creator A5067440332 @default.
• W2083190010 date "1999-04-01" @default.
• W2083190010 modified "2023-10-18" @default.
• W2083190010 title "Plasma enhanced chemical vapour deposition of SiOxNy in an integrated distributed electron cyclotron resonance reactor" @default.
• W2083190010 cites W2006472383 @default.
• W2083190010 cites W2050484241 @default.
• W2083190010 cites W2052322825 @default.
• W2083190010 cites W2059623550 @default.
• W2083190010 cites W2075856882 @default.
• W2083190010 cites W3146732660 @default.
• W2083190010 cites W4365787421 @default.
• W2083190010 doi "https://doi.org/10.1016/s0169-4332(98)00645-x" @default.
• W2083190010 hasPublicationYear "1999" @default.
• W2083190010 type Work @default.
• W2083190010 sameAs 2083190010 @default.
• W2083190010 citedByCount "17" @default.
• W2083190010 countsByYear W20831900102014 @default.
• W2083190010 countsByYear W20831900102018 @default.
• W2083190010 countsByYear W20831900102021 @default.
• W2083190010 crossrefType "journal-article" @default.
• W2083190010 hasAuthorship W2083190010A5010597793 @default.
• W2083190010 hasAuthorship W2083190010A5052833091 @default.
• W2083190010 hasAuthorship W2083190010A5067440332 @default.
• W2083190010 hasConcept C111368507 @default.
• W2083190010 hasConcept C113196181 @default.
• W2083190010 hasConcept C121332964 @default.
• W2083190010 hasConcept C127313418 @default.
• W2083190010 hasConcept C151730666 @default.
• W2083190010 hasConcept C159985019 @default.
• W2083190010 hasConcept C171250308 @default.
• W2083190010 hasConcept C175361016 @default.
• W2083190010 hasConcept C18293161 @default.
• W2083190010 hasConcept C185592680 @default.
• W2083190010 hasConcept C19067145 @default.
• W2083190010 hasConcept C192562407 @default.
• W2083190010 hasConcept C2777289219 @default.
• W2083190010 hasConcept C2777431650 @default.
• W2083190010 hasConcept C2778024649 @default.
• W2083190010 hasConcept C2816523 @default.
• W2083190010 hasConcept C38347018 @default.
• W2083190010 hasConcept C42067758 @default.
• W2083190010 hasConcept C43617362 @default.
• W2083190010 hasConcept C49040817 @default.
• W2083190010 hasConcept C544956773 @default.
• W2083190010 hasConcept C57410435 @default.
• W2083190010 hasConcept C62520636 @default.
• W2083190010 hasConcept C64297162 @default.
• W2083190010 hasConcept C82706917 @default.
• W2083190010 hasConcept C86803240 @default.
• W2083190010 hasConceptScore W2083190010C111368507 @default.
• W2083190010 hasConceptScore W2083190010C113196181 @default.
• W2083190010 hasConceptScore W2083190010C121332964 @default.
• W2083190010 hasConceptScore W2083190010C127313418 @default.
• W2083190010 hasConceptScore W2083190010C151730666 @default.
• W2083190010 hasConceptScore W2083190010C159985019 @default.
• W2083190010 hasConceptScore W2083190010C171250308 @default.
• W2083190010 hasConceptScore W2083190010C175361016 @default.
• W2083190010 hasConceptScore W2083190010C18293161 @default.
• W2083190010 hasConceptScore W2083190010C185592680 @default.
• W2083190010 hasConceptScore W2083190010C19067145 @default.
• W2083190010 hasConceptScore W2083190010C192562407 @default.
• W2083190010 hasConceptScore W2083190010C2777289219 @default.
• W2083190010 hasConceptScore W2083190010C2777431650 @default.
• W2083190010 hasConceptScore W2083190010C2778024649 @default.
• W2083190010 hasConceptScore W2083190010C2816523 @default.
• W2083190010 hasConceptScore W2083190010C38347018 @default.
• W2083190010 hasConceptScore W2083190010C42067758 @default.
• W2083190010 hasConceptScore W2083190010C43617362 @default.
• W2083190010 hasConceptScore W2083190010C49040817 @default.
• W2083190010 hasConceptScore W2083190010C544956773 @default.
• W2083190010 hasConceptScore W2083190010C57410435 @default.
• W2083190010 hasConceptScore W2083190010C62520636 @default.
• W2083190010 hasConceptScore W2083190010C64297162 @default.
• W2083190010 hasConceptScore W2083190010C82706917 @default.
• W2083190010 hasConceptScore W2083190010C86803240 @default.
• W2083190010 hasIssue "1-4" @default.
• W2083190010 hasLocation W20831900101 @default.
• W2083190010 hasLocation W20831900102 @default.
• W2083190010 hasOpenAccess W2083190010 @default.
• W2083190010 hasPrimaryLocation W20831900101 @default.
• W2083190010 hasRelatedWork W2020391346 @default.
• W2083190010 hasRelatedWork W2021783135 @default.
• W2083190010 hasRelatedWork W2047901069 @default.
• W2083190010 hasRelatedWork W2052441188 @default.
• W2083190010 hasRelatedWork W2076683654 @default.
• W2083190010 hasRelatedWork W2119730802 @default.
• W2083190010 hasRelatedWork W2350514894 @default.
• W2083190010 hasRelatedWork W2371191966 @default.
• W2083190010 hasRelatedWork W2375548594 @default.
• W2083190010 hasRelatedWork W2386723571 @default.
• W2083190010 hasVolume "142" @default.
• W2083190010 isParatext "false" @default.
• W2083190010 isRetracted "false" @default.
• W2083190010 magId "2083190010" @default.

• next