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• W2083196103 abstract "In this work, conformal electroless filling of Cu into the patterned chemical vapor-deposited amorphous carbon layer (ACL) pattern was investigated. Due to the difficulty in getting Pd to adsorb onto a pristine ACL, (3-aminopropyl)-trimethoxysilane (APTMS) solution was applied to the surface of the O2 plasma-treated ACL pattern. The increase in the surface energy and the formation of carboxyl functional groups, induced by O2 inductively coupled plasma treatments, on the ACL surface were very effective in enhancing the adsorption of APTMS molecules because of a greater number of sp3 bonds on the surface. The modified ACL surface with adsorbed APTMS was successfully activated using the Pd/Sn activation solution and then electrolessly plated with Cu. The results confirmed that conformal electroless filling effectively filled Cu into the patterned ACL trenches." @default.
• W2083196103 created "2016-06-24" @default.
• W2083196103 creator A5005799740 @default.
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• W2083196103 date "2010-06-28" @default.
• W2083196103 modified "2023-09-26" @default.
• W2083196103 title "Conformal electroless filling of Cu into patterned amorphous carbon layer modified by oxygen plasma and aminosilane treatments" @default.
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• W2083196103 doi "https://doi.org/10.1116/1.3442474" @default.
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