Matches in SemOpenAlex for { <https://semopenalex.org/work/W2083237614> ?p ?o ?g. }
Showing items 1 to 86 of
86
with 100 items per page.
- W2083237614 endingPage "220" @default.
- W2083237614 startingPage "209" @default.
- W2083237614 abstract "Abstract The channeling effect has been used to study the lattice location of Sb, Bi and Pb implanted into Si. Angular scans through the ⟨111⟩, ⟨110⟩ and ⟨100⟩ axes show that the channeling dips obtained in 1 MeV He ion scattering measurements are significantly narrower for the impurities than for the Si host lattice. Annealing of Sb implanted samples at 900°C results in a broadening of the Sb dip but not to the full Si width. Measurements on diffused Sb samples give wider Sb dips than for implanted Sb. Calculations of channeling angular distributions using the average potential model, imply that the smaller widths of the impurity dips can be caused by a small equilibrium displacement of the impurity atoms from lattice sites. Preliminary measurements on B implanted Si crystals annealed at 950°C for 30 minutes, indicate that the dip width obtained from the 11B(p, α)8Be reaction at 670 keV does not differ significantly from that obtained from 670 keV proton scattering off Si." @default.
- W2083237614 created "2016-06-24" @default.
- W2083237614 creator A5003482841 @default.
- W2083237614 creator A5069848540 @default.
- W2083237614 date "1973-01-01" @default.
- W2083237614 modified "2023-09-26" @default.
- W2083237614 title "Channeling studies of ion-implanted silicon" @default.
- W2083237614 cites W1970199191 @default.
- W2083237614 cites W1977270629 @default.
- W2083237614 cites W1977931685 @default.
- W2083237614 cites W1992356015 @default.
- W2083237614 cites W1995086407 @default.
- W2083237614 cites W2023231970 @default.
- W2083237614 cites W2025381833 @default.
- W2083237614 cites W2034858788 @default.
- W2083237614 cites W2037291174 @default.
- W2083237614 cites W2038391440 @default.
- W2083237614 cites W2044270841 @default.
- W2083237614 cites W2051510893 @default.
- W2083237614 cites W2054255570 @default.
- W2083237614 cites W2059129432 @default.
- W2083237614 cites W2084910609 @default.
- W2083237614 cites W2111336189 @default.
- W2083237614 cites W2116154944 @default.
- W2083237614 cites W2917255458 @default.
- W2083237614 doi "https://doi.org/10.1080/00337577308232617" @default.
- W2083237614 hasPublicationYear "1973" @default.
- W2083237614 type Work @default.
- W2083237614 sameAs 2083237614 @default.
- W2083237614 citedByCount "20" @default.
- W2083237614 crossrefType "journal-article" @default.
- W2083237614 hasAuthorship W2083237614A5003482841 @default.
- W2083237614 hasAuthorship W2083237614A5069848540 @default.
- W2083237614 hasConcept C120665830 @default.
- W2083237614 hasConcept C121332964 @default.
- W2083237614 hasConcept C145148216 @default.
- W2083237614 hasConcept C159985019 @default.
- W2083237614 hasConcept C178790620 @default.
- W2083237614 hasConcept C184779094 @default.
- W2083237614 hasConcept C185592680 @default.
- W2083237614 hasConcept C191486275 @default.
- W2083237614 hasConcept C192562407 @default.
- W2083237614 hasConcept C24890656 @default.
- W2083237614 hasConcept C2777855556 @default.
- W2083237614 hasConcept C2781204021 @default.
- W2083237614 hasConcept C41823505 @default.
- W2083237614 hasConcept C49040817 @default.
- W2083237614 hasConcept C544956773 @default.
- W2083237614 hasConcept C71987851 @default.
- W2083237614 hasConceptScore W2083237614C120665830 @default.
- W2083237614 hasConceptScore W2083237614C121332964 @default.
- W2083237614 hasConceptScore W2083237614C145148216 @default.
- W2083237614 hasConceptScore W2083237614C159985019 @default.
- W2083237614 hasConceptScore W2083237614C178790620 @default.
- W2083237614 hasConceptScore W2083237614C184779094 @default.
- W2083237614 hasConceptScore W2083237614C185592680 @default.
- W2083237614 hasConceptScore W2083237614C191486275 @default.
- W2083237614 hasConceptScore W2083237614C192562407 @default.
- W2083237614 hasConceptScore W2083237614C24890656 @default.
- W2083237614 hasConceptScore W2083237614C2777855556 @default.
- W2083237614 hasConceptScore W2083237614C2781204021 @default.
- W2083237614 hasConceptScore W2083237614C41823505 @default.
- W2083237614 hasConceptScore W2083237614C49040817 @default.
- W2083237614 hasConceptScore W2083237614C544956773 @default.
- W2083237614 hasConceptScore W2083237614C71987851 @default.
- W2083237614 hasIssue "3-4" @default.
- W2083237614 hasLocation W20832376141 @default.
- W2083237614 hasOpenAccess W2083237614 @default.
- W2083237614 hasPrimaryLocation W20832376141 @default.
- W2083237614 hasRelatedWork W1991206968 @default.
- W2083237614 hasRelatedWork W1999043866 @default.
- W2083237614 hasRelatedWork W2027182677 @default.
- W2083237614 hasRelatedWork W2034701776 @default.
- W2083237614 hasRelatedWork W2049455007 @default.
- W2083237614 hasRelatedWork W2065669148 @default.
- W2083237614 hasRelatedWork W2072581800 @default.
- W2083237614 hasRelatedWork W2094221410 @default.
- W2083237614 hasRelatedWork W3212841786 @default.
- W2083237614 hasRelatedWork W4249431670 @default.
- W2083237614 hasVolume "17" @default.
- W2083237614 isParatext "false" @default.
- W2083237614 isRetracted "false" @default.
- W2083237614 magId "2083237614" @default.
- W2083237614 workType "article" @default.