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• W2083293412 abstract "In this work, we investigate the directly bonded germanium-silicon interfaces to facilitate the development of high quality germanium silicon hetero integration at the wafer scale. X-ray photoelectron spectroscopy data is presented which provides the chemical composition of the germanium surfaces as a function of the hydrophilic bonding reaction at the interface. The bonding process induced long range deformation is detected by synchrotron x-ray topography. The hetero-interface is characterized by measuring forward and reverse current, and by high resolution transmission electron microscopy." @default.
• W2083293412 created "2016-06-24" @default.
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• W2083293412 date "2011-06-15" @default.
• W2083293412 modified "2023-09-25" @default.
• W2083293412 title "Comprehensive investigation of Ge–Si bonded interfaces using oxygen radical activation" @default.
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• W2083293412 doi "https://doi.org/10.1063/1.3601355" @default.
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