FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2083344162> ?p ?o ?g. }

• W2083344162 endingPage "137" @default.
• W2083344162 startingPage "132" @default.
• W2083344162 abstract "The present study aims at obtaining the etching rate of Si(1 0 0) surfaces as well as the silicon oxide layer when the surfaces are exposed to tetramethylammonium hydroxide (TMAH) water solution. The influence of TMAH solution concentration and solution temperature on the etching rate is also studied. In this work, the value of TMAH concentration (CTMAH) ranges from 2 to 25 wt.% and the etching temperature ranges from 70 to 90°C. Both n- and p-types silicon substrate were tested. Measured results show that etching changes little with the type of silicon substrate. In addition, the etching rate increases with the solution temperature but decreases with an increase in CTMAH for CTMAH greater than 8 wt.%. Among all experimental conditions, a maximum etching rate on the Si(1 0 0) surface reaches a value of 81 μm/h at a solution temperature of 90°C. Similarly, higher temperature can result in a faster etching rate of the SiO2 surface; while the etching rate of SiO2 surface decreases consistently with an increase in CTMAH. Measured results of surface roughness (Ra) on silicon substrate are reported after performing a 20 min etching at solution temperatures from 70 to 90°C. Much smoother substrate surfaces can be observed for higher concentrations." @default.
• W2083344162 created "2016-06-24" @default.
• W2083344162 creator A5015937200 @default.
• W2083344162 creator A5083175571 @default.
• W2083344162 creator A5083311721 @default.
• W2083344162 creator A5083791779 @default.
• W2083344162 date "2001-09-01" @default.
• W2083344162 modified "2023-10-02" @default.
• W2083344162 title "The characteristic behavior of TMAH water solution for anisotropic etching on both Silicon substrate and SiO2 layer" @default.
• W2083344162 cites W1670172520 @default.
• W2083344162 cites W1860398973 @default.
• W2083344162 cites W1989478040 @default.
• W2083344162 cites W2061791472 @default.
• W2083344162 cites W2089995323 @default.
• W2083344162 cites W2092346700 @default.
• W2083344162 cites W2093786774 @default.
• W2083344162 cites W2105824617 @default.
• W2083344162 cites W2107193043 @default.
• W2083344162 cites W2118654775 @default.
• W2083344162 cites W2128663755 @default.
• W2083344162 cites W2135146850 @default.
• W2083344162 cites W2140846697 @default.
• W2083344162 cites W2157955844 @default.
• W2083344162 cites W2163412090 @default.
• W2083344162 doi "https://doi.org/10.1016/s0924-4247(01)00639-2" @default.
• W2083344162 hasPublicationYear "2001" @default.
• W2083344162 type Work @default.
• W2083344162 sameAs 2083344162 @default.
• W2083344162 citedByCount "72" @default.
• W2083344162 countsByYear W20833441622012 @default.
• W2083344162 countsByYear W20833441622013 @default.
• W2083344162 countsByYear W20833441622014 @default.
• W2083344162 countsByYear W20833441622015 @default.
• W2083344162 countsByYear W20833441622016 @default.
• W2083344162 countsByYear W20833441622017 @default.
• W2083344162 countsByYear W20833441622018 @default.
• W2083344162 countsByYear W20833441622019 @default.
• W2083344162 countsByYear W20833441622020 @default.
• W2083344162 countsByYear W20833441622021 @default.
• W2083344162 countsByYear W20833441622022 @default.
• W2083344162 crossrefType "journal-article" @default.
• W2083344162 hasAuthorship W2083344162A5015937200 @default.
• W2083344162 hasAuthorship W2083344162A5083175571 @default.
• W2083344162 hasAuthorship W2083344162A5083311721 @default.
• W2083344162 hasAuthorship W2083344162A5083791779 @default.
• W2083344162 hasBestOaLocation W20833441622 @default.
• W2083344162 hasConcept C100460472 @default.
• W2083344162 hasConcept C107365816 @default.
• W2083344162 hasConcept C111368507 @default.
• W2083344162 hasConcept C113196181 @default.
• W2083344162 hasConcept C127313418 @default.
• W2083344162 hasConcept C127413603 @default.
• W2083344162 hasConcept C1291036 @default.
• W2083344162 hasConcept C130472188 @default.
• W2083344162 hasConcept C159985019 @default.
• W2083344162 hasConcept C171250308 @default.
• W2083344162 hasConcept C185592680 @default.
• W2083344162 hasConcept C192562407 @default.
• W2083344162 hasConcept C2777289219 @default.
• W2083344162 hasConcept C2779227376 @default.
• W2083344162 hasConcept C2780127704 @default.
• W2083344162 hasConcept C42360764 @default.
• W2083344162 hasConcept C43617362 @default.
• W2083344162 hasConcept C49040817 @default.
• W2083344162 hasConcept C544956773 @default.
• W2083344162 hasConcept C71039073 @default.
• W2083344162 hasConceptScore W2083344162C100460472 @default.
• W2083344162 hasConceptScore W2083344162C107365816 @default.
• W2083344162 hasConceptScore W2083344162C111368507 @default.
• W2083344162 hasConceptScore W2083344162C113196181 @default.
• W2083344162 hasConceptScore W2083344162C127313418 @default.
• W2083344162 hasConceptScore W2083344162C127413603 @default.
• W2083344162 hasConceptScore W2083344162C1291036 @default.
• W2083344162 hasConceptScore W2083344162C130472188 @default.
• W2083344162 hasConceptScore W2083344162C159985019 @default.
• W2083344162 hasConceptScore W2083344162C171250308 @default.
• W2083344162 hasConceptScore W2083344162C185592680 @default.
• W2083344162 hasConceptScore W2083344162C192562407 @default.
• W2083344162 hasConceptScore W2083344162C2777289219 @default.
• W2083344162 hasConceptScore W2083344162C2779227376 @default.
• W2083344162 hasConceptScore W2083344162C2780127704 @default.
• W2083344162 hasConceptScore W2083344162C42360764 @default.
• W2083344162 hasConceptScore W2083344162C43617362 @default.
• W2083344162 hasConceptScore W2083344162C49040817 @default.
• W2083344162 hasConceptScore W2083344162C544956773 @default.
• W2083344162 hasConceptScore W2083344162C71039073 @default.
• W2083344162 hasIssue "2" @default.
• W2083344162 hasLocation W20833441621 @default.
• W2083344162 hasLocation W20833441622 @default.
• W2083344162 hasOpenAccess W2083344162 @default.
• W2083344162 hasPrimaryLocation W20833441621 @default.
• W2083344162 hasRelatedWork W204742038 @default.
• W2083344162 hasRelatedWork W2050746330 @default.
• W2083344162 hasRelatedWork W2085976629 @default.
• W2083344162 hasRelatedWork W2136922255 @default.
• W2083344162 hasRelatedWork W2240919621 @default.
• W2083344162 hasRelatedWork W2318469675 @default.
• W2083344162 hasRelatedWork W2348569042 @default.

• next